Laser Micromachining Services at Tel Aviv University

Laser Micromachining Services at Tel Aviv University


The ELAS Master Femto  system:

Precise  laser micro machining is achieved by ultra-short laser pulses, precision of positioning stages and state of the art optics. In MASTER series workstations femtosecond laser pulses cause minimal heat-affected zone and maximize spatial precision.


Specifications :

•Three possible wavelengths:  1064nm, 532nm and 355nm.
•Pulse length 280 femtosecond.
•Power up to 10W.
•Pulse rate between 44KHz and 200KHz
•Stage Precision ±1 micron.
•Spot size 2μm at 355nm, 30μm micron at 1064nm.
•Travel XY: 200mm Z: 100mm.
•Control by SCA software, can use DXF, PLT and STL files.


Machining Applications:

•Thin metal sheets
•Si wafer cutting
•Polyimide (Kapton)
•Silicon Nitride membranes
•Carbon-fiber enforced resin



Dr. Stanislav Stepanov


Tel Aviv University, P.O. Box 39040, Tel Aviv 6997801, Israel
UI/UX Basch_Interactive