CNT based MEMS

After two decades of extensive investigation into the unique properties of carbon nanotubes (CNTs), the focus is now shifting toward the utilization of CNTs in real applications. Of particular interest is the use of CNTs in microtechnologies. To this end, CNT integration methods have to be optimized to guarantee yield, low-cost, and high performances. Over the past several years we have developed three general schemes which facilitate the direct integration of CNTs into microfabricated devices in a seamless manner. Using the chemical vapor deposition (CVD) method, and carefully designed pre-patterned substrates, tubes can be easily deposited at very high fidelity. Through these integration schemes, the CNT growth step becomes equivalent to many other deposition steps of other materials. Using the processes we developed, a substrate can be introduced into the CNT CVD system and CNTs will grow at the right location to match the specific application.
A nanomanipulator with integrated Mechanical De-amplifier for Testing Nanostructures Under Tension
Assaf Ya’akobovitz, Gabriel A. Karp, Yael Hanein and Slava Krylov
Journal of Microsystem Technologies, In press 2011.
Carbon nanotube integration into MEMS devices 
Yael Hanein
Phys. Status Solidi B, pp. 16, 2010
Integration of Suspended Carbon Nanotubes into Micro-Fabricated Devices
Gabriel A. Karp, Assaf Yaakobovitz, Moshe David-Pur, Zvi Ioffe, Ori Cheshnovsky, Slava Krylov and Yael Hanein, 
Journal of Micromechanics and Microengineering, 2009.
Electro-chemical and biological properties of carbon nanotube based multi-electrode arrays
Tamir Gabay, Moti Ben-David, Itshak Kalifa, Raya Sorkin, Ze’ev R. Abrams, Eshel Ben-Jacoband Yael Hanein
Nanotechnology, 18 (2007) 035201-035206, Full text: pdf
Tube-Tube and Tube-Surface Interactions in Straight Suspended Carbon Nanotube Structures
Ze’ev Abrams and Yael Hanein
Journal of Physical Chemistry B, 110 (2006) 21419-21423, 2006., Full text: pdf

Contact Details

Admin: Ms. Sara Ben Arie (This email address is being protected from spambots. You need JavaScript enabled to view it.)

Mail address: Prof. Yael Hanein (This email address is being protected from spambots. You need JavaScript enabled to view it.), School of Electrical Engineering, Tel-Aviv University, Ramat-Aviv, Tel-Aviv, 69978, Israel. 

Office address: (1) EE Building (Map), Office 232 and (2) Center for Nanoscience and Nanotechnology (Map), Office 003.

Labs: (1) EE building, Room: 207, 972-3-6407937, and (2) Center for Nanoscience and Nanotechnology, Rooms: 05, 06, 07, 08, 20, 972-3-6405707, 5709, 8379.

Yael Hanein, Ph.D. School of Electrical Engineering; Physical Electronics, Tel Aviv University, Tel Aviv 69978, Israel. Phone: +972-3-6407698 Fax: +972-3-6423508