Gertner Institute Summer School on Nano Medicine, June 2016

Gertner Institute Summer School on Nano Medicine, June 2016

Chaoul 8th Annual Workshop, Hagoshrim 2012

Chaoul 8th Annual Workshop, Hagoshrim 2012

Chaoul 9th Annual Workshop, Nazareth 2013

Chaoul 9th Annual Workshop, Nazareth 2013

XIN inauguration ceremony, May 2014

XIN inauguration ceremony, May 2014

Olympus Confocal microscope LEXT OLS3100

photo12

Description:
Confocal laser scanning microscopes allow for observations of three-dimensional shapes, such as high-density semiconductors and micro-fabricated MEMS. The LEXT microscope uses a laser scaning head for both direct imaging of the surface and for surface profile measurements.

Specifications
Features:

  1. Resolution of 0.12µm.
  2. The microscope is equipped with a 408 nm violet opto-system. Improved Z measurement repeatability of 3µ=0.05+0.002Lµm with the standard error, where L is the measurement length in µm.
  3. Allows for color 3D observations and brightfield, darkfield and differential interference observations.
  4. Provides simultaneous observations of darkfield or differential interference contrast observations and laser observations on the same screen.

Measurement part

Structure

Special frame

Outside dimensions

464 x 559 x 614.5
* Not including the vibration-isolating stand

Weight

56.9kg

Maximum height of
specimen

100mm

Load capacity

10kg

XY stage

Manual: 100 x 100(mm), Electric: 150 x 100(mm)

Objectives

Quantity

5

Magnification

5x

10x

20x

50x

100x

Working distance:
mm

20.0

10.1

3.1

0.33

0.35

Numerical aperture

0.15

0.3

0.46

0.95

0.95

Observation
and
measurement range

Horizontal (H):
µm

2,560

1,280

640

256

128

Vertical (V):
µm

2,560

1,280

640

256

128

Magnification on monitor

100 -
600

200 -
1200

400 -
2400

1000 -
6000

2000 -
12000

Optical zoom

1x - 6x

Confocal method

Pinhole

Photo detector

Photo multiplier

Measurement

laser

Light source

Purple semiconductor laser

Wave
length / Output

408nm / 0.9µW (JIS Class 2)

Image import method

CFO search (Fine, Fast) Step search

Image import mode

Contrast Mode, Enhance Mode

Planar (XY) display resolution

1024 x 1024 (pixel)

Frame memory

Brightness: 1024 x 1024 x 12bit
Height: 1024 x 1024 x 16bit

Frame rate

12Hz

Planar(XY)
measurement

Minimum
resolution

0.12µm

Measurement
repeatability

3σ(n-1)=0.02
* No limitation on object line width

Height(Z)
measurement

Measurement
range

10mm

Minimum
movement
resolution

0.01 µm

Minimum display
resolution

0.001 µm

Height scale

Open control by linear scale

Measurement
repeatability: µm

3σ (n-1)=0.05+0.002L

Main unit control

Auto focus / Auto gain / Band scan

Image processing, 2D image
processing, and 3D image
processing

Width measurement / Bump measurement / Surface area
measurement / Volume measurement / Line roughness
measurement / Surface roughness measurement / Report
function / 2-channel display