Micro and Nano Fabrication and Characterization Equipment


MNCF is a central facility for micro and nano fabrication and characterization, located at the campus of Tel-Aviv University. MNCF is a joint-venture of the TAU faculty of engineering and the center for nano science and nano-technology.


MNCF comprises class 100 and 1000 clean rooms and includes a wide range of state of the art instrumentation such as: Photolithography equipment including mask fabrication, spinners, and mask aligner, wet chemical stations, thin film deposition systems, plasma assisted dry etch and deposition systems, dicing, wirebonding, as well as a large variety of characterization equipment such as: confocal microscopy, profilometer, Ellipsometer, scanning electron microscopy, and atomic force microscopy.


The center also offers advanced nano-patterning equipment such as e-beam writer, focused ion beam (FIB), as well as a nano imprint lithography system (NIL). A new addition to the advanced infrastructure is a fempto second laser micromachining system comprising of three different wavelength to allow processing of different material kinds.


MNCF is aimed at providing Tel Aviv University facility users with access to this state of the art micro and nano fabrication and characterization equipment. The facility highly competent personnel consists of nine highly experienced engineers and center researchers who train, consult, and help users to operate the equipment and to develop suitable protocols.


External users can choose to get trained and use the facility on their own or perform R&D projects with the help of MNCF staff. These projects can be a defined step or a more convoluted project in which the staff brain storms with the customer and perform the R&D work interactively.


The facilities are located in two locations:

  • Engineering facility - located in the Wolfson labs building
  • Nano center facility - located in the nano center, below the exact science library


To learn more about our services, contact Mr. Zvi Kopolovich  (zvik@tauex.tau.ac.il) or send us a quest for more details

Tel Aviv University, P.O. Box 39040, Tel Aviv 6997801, Israel
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