Turning on Suss MA6 mask aligner - film

  1. Turning on machine main power
  2. Turning on lamp power supply

 

Preparing Headway Spinner - film

  1. Making and placing liner for Headway spinner
  2. Loading chuck into spinner

 

Hot Plate and Headway Spin Controller - film

  1. Setting hotplate temperature
  2. Spin controller parameters
  3. Spin controller programming

                               

Photoresist Spinning - film

  1. Spinner safety
  2. Wafer placement and vacuum
  3. HMDS spinning
  4. Resist spinning
  5. Bubble removal
  6. Cleaning wafer backside

 

Preparing MA6 for exposure - film

  1. Turning on machine
  2. Changing chuck
  3. Changing mask holder

 

Exposure with MA6 (no alignment) - film

  1. Inserting photomask and mask holder
  2. Inserting wafer
  3. Reposition wafer
  4. Changing exposure parameters
  5. Exposure
  6. Extracting wafer
  7. Extracting mask holder

 

Development - film

  1. Photoresist developing
  2. Wafer rinsing and drying

 

Disposing of Chemicals and Cleaning Spinner - film

  1. Disposing of developer and rinsing dishes
  2. Cleaning spinner

Emergency Numbers

03-640-5555  Security

03-640-8222  Security Emergency

03-640-7707  Medical Emergency

03-640-9499  Nano Clean Room

03-640-6976  Eng Clean Room

03-640-5326  Lab number: 301 (Eng)

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