Electron microscopes - Dr. Netta Hendler and Dr. Zahava Barkai (eSEM)

AFM - Dr. Artium Khatchtouriants

  • Molecular Imaging PicoSPM II system
  • NT-MDT SMENA-A AFM
  • Biologically oriented, high precision - AFM - JPK NanoWizard III
  • High spectral resolution confocal Raman spectrometer (coupled to AFM) Horiba Jobin Yvon Lab-Ram HR

Optical and Confocal Microscopy - Dr. Artium Khatchtouriants and Dr. Youry Borisenkov

  • Metallurgical Confocal microscope (LEXT)
  • Inspection Microscopes (Olympus MX-40, MX-50)
  • Measurements: KLA P16 Profilometer, Ellipsometer, Reflectometer

Ebeam Lithography - Dr. Netta Hendler and Alon Kosloff

  • E-beam lithography (Raith 150 Ultra High Precision E-Beam Lithography and Metrology System)

 

Photolithography - Dr. Youry Borisenkov and Erez Benjamin

  • Contact lithography (Suss MA6, MJB3)
  • Direct laser writing (Heidelberg)
  • Photomask preparation (Heidelberg)
  • Nanoimprint lithography (S.E.T. FC-150)

Thin Film Deposition - Dr. Valery Gerber and Dror Weisman

  • E-beam deposition (VST)
  • Thermal evaporation (VST)
  • RF sputtering (MRC)

Wet and Plasma Etching - Dr. Valery Garber and Dr. Youry Borisenkov

  • RIE Etching
  • DRIE etching
  • Wet etching
  • Wet and dry Cleaning

Backend - Dr. Youry Borisenkov

  • Dicing (Disco DAD 3350)
  • Wire Bonding
  • Precision Diamond Scriber (ATV)

Laser Micromachining - Dr. Stanislav Stepanov

Standard Operating Procedures

The SOPs can be used as an introduction prior to actual training or as reminder on how to use the tool. Training with lab personnel is still required prior to independent use of the machines. 

Nextral RIE 

Nano Clean room e-beam Evaporator 

MJB3 Mask Aligner

MA6 Mask Aligner

Disco Dicer

Ion Beam Sputter

Plasma preen (asing)

Piranah use (acid bench)

Zeta Potential (Zetasizer)

Critical Point Dryer (CPD) 

DRIE DSE3  

Jipilec RTP 

PECVD 

KLP P16 Profilometer 

HRSEM JEOL 6700

Basic Lithography Introduction:

Go to the Books 24x7 link. Use this guide for registration.

Find the following book: Introduction to Microfabrication, Second Edition by Sami Franssila  John Wiley & Sons © 2010. Read the chapter on Photolithography (chapter 9). 

 

Filmed Training Sessions:

Please note - watching the video does not replace actual training but can be very helpful! Training with lab personnel is still required prior to independent use of the machines.

Lithography Training Films (Dr. David Schreiber)

Theoretical Introduction to AFM and Raman (Dr. Artium Khatchtouriants)

Hands on AFM Training - JPK (Dr. Artium Khatchtouriants)

MI-AFM Training (Dr. Artium Khatchtouriants)

For more details, please contact Mr. Valery Garber (This email address is being protected from spambots. You need JavaScript enabled to view it.">This email address is being protected from spambots. You need JavaScript enabled to view it.) or Mr. Zvi Kopolovich (This email address is being protected from spambots. You need JavaScript enabled to view it.">This email address is being protected from spambots. You need JavaScript enabled to view it.This email address is being protected from spambots. You need JavaScript enabled to view it.">)

Emergency Numbers

03-640-5555  Security

03-640-8222  Security Emergency

03-640-7707  Medical Emergency

03-640-9499  Nano Clean Room

03-640-6976  Eng Clean Room

03-640-5326  Lab number: 301 (Eng)

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