E-beam Evaporator VST (GB)

Manufacturer and model:

VST TFDS-870.

Description:

Capable of heating materials to high temperature, high purity film, very high deposition rates and evaporation of high temperature materials and refractory metals. Can evaporate high melting point materials.

Materials: 

Au, Ag, Co, Cr, Cu, In, Nb, Ni, Mo, Pd, Pt, Sn, Ta, Ti, W, Fe, CF2, MgF.

Specification:

• No load lock.
• Rotating sample holder.
• Cooling down to LN2.
• Heating up to 200˚C.
• Base pressure 8x10-8 Torr.
• Working pressure 5x10-7 Torr.
• 6 crucibles + 2 thermal sources.
• Typical deposition rate: 0.5 Å/sec.
• Nitrogen environment to avoid oxidation.

​Location:

Glove box lab, Nano center building.

Tool Owner:

Nirit Porecki-Shamay (nporecki@tauex.tau.ac.il).

Tool Trainer:

Lev Rovinsky (levrovinsky@mail.tau.ac.il).

Rates & Costs for external Commercial / Industrial:

Glove box lab - 200 NIS / hr.

Tool - 440 NIS / hr.

Staff Time - 440 NIS / hr.