E-beam Evaporator VST (GB)

E-beam Evaporator VST (GB)
E-beam Evaporator VST (GB)

Manufacturer and model:




Capable of heating materials to high temperature, high purity film, very high deposition rates and evaporation of high temperature materials and refractory metals. Can evaporate high melting point materials.



Au, Ag, Co, Cr, Cu, In, Nb, Ni, Mo, Pd, Pt, Sn, Ta, Ti, W, Fe, CF2, MgF.



  • Up to 4‘’ wafers.
  • Rotating sample holder.
  • Typical deposition rate: 0.5 Å/sec.
  • Nitrogen environment to avoid oxidation.
  • Full wafer depostion


Glove box lab, Nano center building.


Tool Owner:

Sergio Bloch (csebta@tauex.tau.ac.il).


Tool Trainer:

Edi Mados (ednamados@mail.tau.ac.il).

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