Diode Sputtering MRC 8620

Manufacturer and model:

RF Diode Sputtering System MRC 8620-VST.

Materials: 

Au, Ag, Co, Cr, Cu, Ni, Ta, Ti, W, CF2, ITO, SO, SiO2, SiNx, TaN, TiN, TiO2.

Specification:

• Up to 6‘’ wafers.
• No load lock.
• Base pressure 8x10-7Torr.
• Working pressure 5x10-3 – 50x10-3 Torr.
• 3 targets.
• Reactive sputtering with N2 and O2.
• Substrate biasing possibility, also during sputtering process.

​Location:

Room #301, Wolfson building of Electrical Engineering.

Tool Owner:

Gidon Jacob (gjacob@tauex.tau.ac.il).

Tool Trainer:

Gidon Jacob (gjacob@tauex.tau.ac.il).

Rates & Costs for external Commercial / Industrial:

Room #301 – 200 NIS/hr.

Tool - 440 NIS / hr.

Staff Time - 440 NIS / hr.