Confocal Microscope Olympus LEXT 4000

Confocal Microscope Olympus LEXT 4000
Confocal Microscope Olympus LEXT 4000

Manufacturer and model:

Olympus OLS 4000 LEXT.



Confocal Microscope for measurements of surface roughness, film thickness and wafer stress analysis.



  • Z minimum resolution: 10 nm.
  • X-Y minimum resolution: 120 nm.
  • Measurements: surface roughness, line roughness, profile, step, angles, distance, areas and Area/Volume.
  • Displays 3D images of the sample.
  • Confocal 2D images, laser confocal images, and color confocal images.
  • Differential interference Contrast (DIC).
  • Film thickness.
  • Particle count.
  • Filter options help correct for noise, surface tilt, surface curvature or roughness.
  • Intensity data exported in .cvs file format.
  • Data can be saved in Excel file.
  • Max sample diameter: 6 inch.
  • Maximum sample thickness: 10 cm.
  • Maximum sample weight: 1 kg.


Engineering Cleanroom, Wolfson building of Electrical Engineering.


Tool Owner:

Erez Benjamin (


Tool Trainer:

May Hayoun (

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