Confocal Microscope Olympus LEXT 4000
Manufacturer and model:
Olympus OLS 4000 LEXT.
Description:
Confocal Microscope for measurements of surface roughness, film thickness and wafer stress analysis.
Specification:
- Z minimum resolution: 10 nm.
- X-Y minimum resolution: 120 nm.
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Measurements: surface roughness, line roughness, profile, step, angles, distance, areas and Area/Volume.
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Displays 3D images of the sample.
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Confocal 2D images, laser confocal images, and color confocal images.
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Differential interference Contrast (DIC).
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Film thickness.
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Particle count.
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Filter options help correct for noise, surface tilt, surface curvature or roughness.
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Intensity data exported in .cvs file format.
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Data can be saved in Excel file.
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Max sample diameter: 6 inch.
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Maximum sample thickness: 10 cm.
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Maximum sample weight: 1 kg.
Location:
Engineering Cleanroom, Wolfson building of Electrical Engineering.
Tool Owner:
Erez Benjamin (erezbenj@mail.tau.ac.il).
Tool Trainer:
May Hayoun (mayhhayoun@gmail.com).