Confocal Microscope Olympus LEXT 4000

Manufacturer and model:

Olympus OLS 4000 LEXT.

Description:

Confocal Microscope for measurements of surface roughness, film thickness and wafer stress analysis.

Specification:

• Z minimum resolution: 10 nm.
• X-Y minimum resolution: 120 nm.
• Measurements: surface roughness, line roughness, profile, step, angles, distance, areas and Area/Volume.
• Displays 3D images of the sample.
• Confocal 2D images, laser confocal images, and color confocal images.
• Differential interference Contrast (DIC).
• Film thickness.
• Particle count.
• Filter options help correct for noise, surface tilt, surface curvature or roughness.
• Intensity data exported in .cvs file format.
• Data can be saved in Excel file.
• Max sample diameter: 6 inch.
• Maximum sample thickness: 10 cm.
• Maximum sample weight: 1 kg.

​Location:

Engineering Cleanroom, Wolfson building of Electrical Engineering.

Tool Owner:

Erez Benjamin (erezbenj@mail.tau.ac.il).

Tool Trainer:

May Hayoun (mayhhayoun@gmail.com).