Mask Aligner MJB3

Mask Aligner MJB3
Mask Aligner MJB3

Manufacturer and model: 

KARL SUSS MJB3 Mask Aligner.

 

Description: 

The Karl SUSS MJB3 Mask Aligner is designed for high resolution photolithography. Irregular shaped and pieces of different thicknesses can be handled.  

 

Specification:

  • Top Side Alignment.
  • Vacuum, Hard and soft Contact modes.
  • 3" wafer size.
  • Mask size 4" x 4".
  • 1 µm feature size resolution in thin resist.

 

Location:

Clean Room, Nano center building.

 

Tool Owner:

Dr. Boris Yofis (boris.yofis@gmail.com). 

 

Tool Trainer:

Dr. Boris Yofis (boris.yofis@gmail.com). 

 

Rates & Costs for external Commercial / Industrial:

Clean Room - 200 NIS / hr

Tool - 440 NIS / hr

Staff Time - 440 NIS / hr.

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