Mask Aligner MJB3

Manufacturer and model: 

KARL SUSS MJB3 Mask Aligner.

Description: 

The Karl SUSS MJB3 Mask Aligner is designed for high resolution photolithography. Irregular shaped and pieces of different thicknesses can be handled.  

Specification:

• Top Side Alignment.
• Vacuum, Hard and soft Contact modes.
• 3" wafer size.
• Mask size 4" x 4".
• 1 µm feature size resolution in thin resist.

Location:

Clean Room, Nano center building.

Tool Owner:

Dr. Boris Yofis (boris.yofis@gmail.com). 

Tool Trainer:

Dr. Boris Yofis (boris.yofis@gmail.com). 

Rates & Costs for external Commercial / Industrial:

Clean Room - 200 NIS / hr

Tool - 440 NIS / hr

Staff Time - 440 NIS / hr.