Tools and Owners

Labs and Facilities
Electron microscopes, Laser Micro-machining

Tools and Owners

 

Technology Segment

Equipment Description

 Nanocenter Owner

Deposition 

Ebeam evaporator VST (Nano) Stanislav Stepanov
Ebeam evaporator VST (GB) Stanislav Stepanov
Magnetron Sputtering Vinci  Stanislav Stepanov
Magnetron Sputtering PENTA  Valery Garber
Diode Sputtering MRC  Gidon Jacob
Ebeam evaporator Vinci  Nirit Porecki
PECVD PlasmTherm Valery Garber
ALD Beneq Inna Shekhtman
RTP Nirit Porecki
Electroplating Yamamoto Inna Shekhtman

Etch 

RIE NEXTRAL  Valery Garber
RIE Oerlicon Valery Garber
Deep RIE  SLR ICP Valery Garber
Deep RIE Versaline DSE Valery Garber
Ion Beam Milling AJA  Nirit Porecki
Femtosecond Laser ELAS  Stanislav Stepanov

Lithography

Photolithography MA6 Boris Yofis
Photolithography MJB3 Boris Yofis
Nano Imprint Lithogrpahy Nirit Porecki
Direct Laser Writer (mask and wafer) Heidelberg Stanislav Stepanov

Ion Beam 

Ion Beam Lithography Raith 150 Inna Shekhtman
Ion Beam Lithography Raith 150-II Inna Shekhtman
FIB Raith Gal Radovsky 
Dual Beam FIB ThermoFisher  Gal Radovsky 

Mask

File Design

Stanislav Stepanov  
Mask Fabrication Stanislav Stepanov

Back End

Dicing Disco Saw Stanislav Stepanov
Ball Wire bonder Stanislav Stepanov
Wedge Wire bonder Stanislav Stepanov

Characterization 

Profilometer KLA Gal Radovsky 
Ellipsometer Wollam Stanislav Stepanov
UV-VIS-NIR Spectrometer Cary500i Gal Radovsky 
FTIR spectrometer Bruker Gal Radovsky 
Confocal Microscope Olympus LEXT 4000 Gal Radovsky 
Confocal Microscope Olympus LEXT3000 Gal Radovsky 
Contact Angle Gal Radovsky 
NanoDrop Gal Radovsky 
DLS  Gal Radovsky 
HRSEM JEOL Gal Radovsky 
HRSEM ZEISS Gemini 300 Gal Radovsky 
AFM Gal Radovsky 
Raman Spectroscopy Gal Radovsky 

 

 

Tel Aviv University makes every effort to respect copyright. If you own copyright to the content contained here and / or the use of such content is in your opinion infringing, Contact us as soon as possible >>
Tel Aviv University, P.O. Box 39040, Tel Aviv 6997801, Israel
UI/UX Basch_Interactive