• Main
  • Labs and Facilities

    Labs and Facilities
    Electron microscopes, Laser Micro-machining

     

    Equipment        

    Tools

    Tool owners/trainers/Phone nombers

    Comments

    Deposition tools 

    e-beam evaporator

    VST

    Stanislav Stepanov

    stass@tauex.tau.ac.il

    506387148

    Nano CR

    Omri Heifler

    heifleromri@gmail.com

    547412805

     

    e-beam evaporator

    VST

     

    Stanislav Stepanov

    stass@tauex.tau.ac.il

    506387148

    Glovebox lab

    Dror Weizman

    drorweisman@gmail.com

    504321087

     

    Omri Heifler

    heifleromri@gmail.com

    547412805

     

    Magnetron sputtering PENTA

    Valery Garber

    valeryg@tauex.tau.ac.il

    542687131

    Eng. CR

    Itay Gabriel

    itaygabriel@mail.tau.ac.il

    523669311

     

    Magnetron sputtering Vinci

    Stanislav Stepanov

    stass@tauex.tau.ac.il

    506387148

    Nano #50, coming soon

    Valery Garber

    valeryg@tauex.tau.ac.il

    542687131

     

    Diode sputtering

    MRC

    Gidon Jacob

    gjacob@tauex.tau.ac.il

    508789615

    Eng., room #301

    Itay Gabriel

    itaygabriel@mail.tau.ac.il

    523669311

     

    e-beam evaporator

    Vinci

    Nirit Porecki

    nporecki@tauex.tau.ac.il

    523376085

    Eng. CR, plasma

    Alexander Kellarev

    kellarev@post.tau.ac.il

    507509386

    pre-clean, sample heating

    Plasma Enhanced CVD, PlasmaTherm Oerlicon

    Valery Garber

    valeryg@tauex.tau.ac.il

    542687131

    SiNx, SiOx, Eng. CR

    Boris Yofis

    boris.yofis@gmail.com

    544771343

     

    Erez Benjamin

    erezbenj@gmail.com

    507772097

     

    Ion Beam Sputtering

    Leybold/VST

    Nirit Porecki

    nporecki@tauex.tau.ac.il

    523376085

    Nano CR

    Stanislav Stepanov

    stass@tauex.tau.ac.il

    506387148

     

    Atomic Layer Deposition

    Beneq–TSE200

    Inna Shekhtman

    innas@post.tau.ac.il

    543339896

    Nano CR

    Itay Gabriel

    itaygabriel@mail.tau.ac.il

    523669311

     

    Electroplating Yamamoto 

    Inna Shekhtman

    innas@post.tau.ac.il

    543339896

    Eng., room #301

    Raz Samira

    raz.samira@mail.huji.ac.il

    542338449

     

    Etching tools 

    Reactive Ion Etching

    NEXTRAL 860 HDP RIE

    Valery Garber

    valeryg@tauex.tau.ac.il

    542687131

    Eng. CR

    Erez Benjamin

    erezbenj@gmail.com

    507772097

     

    Reactive Ion Etching

    Oerlicon RIE

    Valery Garber

    valeryg@tauex.tau.ac.il

    542687131

    Nano CR

    Nirit Porecki

    nporecki@tauex.tau.ac.il

    523376085

     

    Deep RIE

    SLR770 ICP

    Valery Garber

    valeryg@tauex.tau.ac.il

    542687131

    Eng. CR

    Dr. Boris Yofis

    boris.yofis@gmail.com

    36405710

     

    Deep RIE

    Versaline DSE III

    Valery Garber

    valeryg@tauex.tau.ac.il

    542687131

    Eng. CR

    Erez Benjamin

    erezbenj@gmail.com

    507772097

     

    Ion Beam Milling

    AJA

    Nirit Porecki         

    nporecki@tauex.tau.ac.il

    523376085

    Eng. CR

    Itay Gabriel

    itaygabriel@mail.tau.ac.il

    523669311

     

    Lithography tools 

    Photolithography

    MA6

    Erez Benjamin

    erezbenj@gmail.com

    507772097

    Eng. CR

    Boris Yofis

    boris.yofis@gmail.com

    544771343

     

    Photolithography

    MJB3

    Boris Yofis

    boris.yofis@gmail.com

    544771343

    Nano CR

    Stanislav Stepanov

    stass@tauex.tau.ac.il

    506387148

     

    E-beam Lithography

    Raith 150

    Inna Shekhtman

    innas@post.tau.ac.il

    543339896

    Nano #20

    Itay Gabriel

    itaygabriel@mail.tau.ac.il

    523669311

     

    E-beam Lithography

    Raith 150-II

    Inna Shekhtman

    innas@post.tau.ac.il

    543339896

    Nano #25

    Itay Gabriel

    itaygabriel@mail.tau.ac.il

    523669311

     

    Ion-line beam

    Lithography

    Gal Radovsky

    galradovsky@tauex.tau.ac.il

    506387148

    Nano #19

    Daniel Vilchinskiy

    vilchinskiy@mail.tau.ac.il

    545290410

     

    Nano Imprint

    Lithography

    Stanislav Stepanov

    stass@tauex.tau.ac.il

    506387148

    Nano CR

    Characterization tools 

    Profilometer

    KLA-Tenkor P16+

    Profilometer

    Erez Benjamin

    erezbenj@gmail.com

    545290411

    Eng. CR

    Gal Radovsky

    galradovsky@tauex.tau.ac.il

    506387148

     

    Ellipsometer Woollam

    Stanislav Stepanov

    stass@tauex.tau.ac.il

    545290410

    Eng. CR

    Gal Radovsky

    galradovsky@tauex.tau.ac.il

    506387148

     

    UV-VIS-NIR spectrometer Cary500i

    Gal Radovsky

    galradovsky@tauex.tau.ac.il

    544365910

    Nano CR

    Valery Garber

    valeryg@tauex.tau.ac.il

    542687131

     

    FTIR spectrometer

    BRUKER VERTEX70

    Gal Radovsky

    galradovsky@tauex.tau.ac.il

    544365910

    Nano CR

    Valery Garber

    valeryg@tauex.tau.ac.il

    542687131

     

    FTIR spectrometer

    Thermo-Nikolet

    Uri Arieli

    uriarieli14@gmail.com

    036408663

    Dr. H. Suchowski's lab Shenkar #322

    Confocal Microscope Olympus LEXT 4000

    Daniel Vilchinskiy

    vilchinskiy@mail.tau.ac.il

    545290410

     

    Confocal Microscope Olympus LEXT 3000

    Alexander Kellarev

    kellarev@post.tau.ac.il

    507509386

    Nano #28

    Wetting Angle

    Nirit Porecki

    nettahen@post.tau.ac.il

    523376085

    Glovebox lab

    Nano Drope

    Anna Gutkin

    gutkin.anna@gmail.com

    545868254

    Nano #9

    Zetasizer DLS

    Anna Gutkin

    gutkin.anna@gmail.com

    545868254

    Nano #9

    HRSEM  JSM-6700

     

    Yarden Melamed

    yarden.mx7@gmail.com

    524662700

    Nano #18

    Ori Avayu

    oria@post.tau.ac.il

    547494808

     

    HRSEM Zeiss Gemini 300

     

    Gal Radovsky

    galradovsky@tauex.tau.ac.il

    544365910

    Nano#28

    Yarden Melamed

    yarden.mx7@gmail.com

    524662700

     

    Cr Sputter coating for HRSEM

    Yarden Melamed

    yarden.mx7@gmail.com

     

    Nano #18

    Ori Avayu

    oria@post.tau.ac.il

    547494808

     Nano #18

    ESEM wet mode

    Zahava Barkay

    barkay@post.tau.ac.il

    03-407818

    Material Engineering

    ESEM tensile

    Zahava Barkay

    barkay@post.tau.ac.il

    03-407818

    Material Engineering

    Atomic Force

    Microscopy (AFM)

    Omri Heifler

    heifleromri@gmail.com

    545290410

    Nano

    Gal Radovsky

    galradovsky@tauex.tau.ac.il

    544365910

     + probes price

    Raman Spectroscopy

    Gal Radovsky

    galradovsky@tauex.tau.ac.il

    544365910

    Nano

    Back end tools 

    Critical Point Dryer CPD 

    Erez Benjamin

    erezbenj@gmail.com

    507772097

    Eng. CR not in use

    Gidon Jacob

    gjacob@tauex.tau.ac.il

    508789615

     

    Rapid Thermal Annealing  RTP

    Nirit Porecki

    nettahen@post.tau.ac.il

    523376085

    Eng. CR

    Daniel Vilchinskiy

    vilchinskiy@mail.tau.ac.il

    507541359

     

    Dicing

    DISCO SAW

    Stanislav Stepanov

    stass@tauex.tau.ac.il

    545290410

    Eng., lab #301

    Raz Samira

    raz.samira@mail.huji.ac.il

    542338449

     

    Laser Micromachining ELAS Master Femto

    Stanislav Stepanov

    stass@tauex.tau.ac.il

    545290410

    Nano #37

    Wire bonder

    (ball or wedge)

    Stanislav Stepanov

    stass@tauex.tau.ac.il

    545290410

    Eng., lab #301

    Raz Samira

    raz.samira@mail.huji.ac.il

    542338449

     

    Mask Fabrication 

    File design

    Stanislav Stepanov

    stass@tauex.tau.ac.il

    545290410

    Eng. CR

    Mask Fabrication

    Heidelberg DWL-66fs

    Stanislav Stepanov

    stass@tauex.tau.ac.il

    545290410

    Eng. CR

     

     

    Tel Aviv University, P.O. Box 39040, Tel Aviv 6997801, Israel
    UI/UX Basch_Interactive