System Owners

System Owners
Clean Room, TAU Center for Nanoscience and Nanotechnology

Technology
Segment

Equipment
Description

Nanocenter
Owner

Tool
Trainer

Deposition E-beam evaporator VST (Nano) Sergio Bloch Edi Mados
E-beam evaporator VST (GB) Sergio Bloch Edi Mados
Magnetron Sputtering Vinci Sergio Bloch Dolev Roitman
Magnetron Sputtering PENTA Sergio Bloch Edi Mados
Ebeam evaporator Vinci Sergio Bloch Dolev Roitman
PECVD PlasmTherm Sergio Bloch Lev Rovinsky
ALD Beneq Inna Shekhtman Lev Rovinsky
RTP Nirit Porecki Nirit Porecki
Electroplating Yamamoto Dr. Boris Yofis Roy Marrache
 
Etch RIE NEXTRAL Erez Benjamin Erez Benjamin
RIE Oerlicon Dr. Boris Yofis Dr. Boris Yofis
Deep RIE Versaline DSE Erez Benjamin Erez Benjamin
Ion Beam Milling AJA Nirit Porecki Nirit Porecki
 
Micro-machining Femtosecond Laser ELAS Roy Davidi Roy Davidi
 
Lithography Photolithography MA6 Erez Benjamin Erez Benjamin
Nano Imprint Lithogrpahy Nirit Porecki Nirit Porecki
Direct Laser Writer (mask and wafer) Heidelberg Inna Shekhtman Inna Shekhtman
E-Beam Lithography Raith 150 Inna Shekhtman Dolev Roitman
E-Beam Lithography Raith 150-II Inna Shekhtman Dolev Roitman
 
Ion Beam Helius 5 Dual Beam FIB ThermoFisher Roy Davidi Roy Davidi
 
Mask File Design Inna Shekhtman Inna Shekhtman
Mask Fabrication (Soda Lime substrate) Inna Shekhtman Inna Shekhtman
 
Back End Dicing Disco Saw Raz Samira Raz Samira
ATV Vacuum Oven 301 Gidon Jacob Gidon Jacob
Ball Wire bonder Nirit Porecki Bar Favelukis
Wedge Wire bonder Nirit Porecki Bar Favelukis
 
Characterization XRD Dr. David Levy Dr. David Levy
XPS/AES Dr. Pini Shekhter Dr. Pini Shekhter
ESEM Dr. Zahava Barkay Dr. Zahava Barkay
TOF/SIMS Dr. Alexander
Gladkikh
Dr. Alexander
Gladkikh
S/TEM JEOL JEM-2010F Dr. George Levi Dr. George Levi
Profilometer KLA Erez Benjamin Erez Benjamin
Profilometer DETAK Dr. Boris Yofis Dolev Roitman
Ellipsometer Wollam Sergio Bloch Sergio Bloch
UV-VIS-NIR Spectrometer Lamda1050 Dr. Valery Garber Dr. Valery Garber
FTIR spectrometer Bruker Dr Anastasia
Adelberg
Dr Anastasia
Adelberg
Confocal Microscope Olympus LEXT 4000 Erez Benjamin May Hayoun
I-V/C-V meter Keithley 4210 Dr. Valery Garber May Hayoun
4 Point Probe Dr. Valery Garber May Hayoun
Contact Angle Nirit Porecki Roman Nudelman
NanoDrop Roman Nudelman Roman Nudelman
DLS (Zeta sizer/potential) Roman Nudelman Roman Nudelman
HRSEM ZEISS Gemini 300 Dr. Pini Shekhter Adam Cohen
AFM Dr Anastasia
Adelberg
Dr Anastasia
Adelberg
Raman Spectroscopy Dr Anastasia
Adelberg
Dr Anastasia
Adelberg

 

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