System Owners

System Owners
Clean Room, TAU Center for Nanoscience and Nanotechnology

Technology
Segment

Equipment
Description

Nanocenter
Owner

Tool
Trainer

Deposition E-beam evaporator VST (Nano) Nirit Porecki Edi Mados
E-beam evaporator VST (GB) Nirit Porecki Edi Mados
Magnetron Sputtering Vinci Sergio Bloch Dolev Roitman
Magnetron Sputtering PENTA Sergio Bloch Neta Melech 
Ebeam evaporator Vinci Nirit Porecki Dolev Roitman
PECVD PlasmTherm Sergio Bloch Neta Melech
ALD Beneq Inna Shekhtman Inna Shekhtman
RTP Nirit Porecki Nofar Livni
Electroplating Yamamoto Inna Shekhtman Raz Samira
 
Etch RIE NEXTRAL Erez Benjamin Erez Benjamin
RIE Oerlicon Dr. Boris Yofis Dr. Boris Yofis
Deep RIE Versaline DSE Erez Benjamin Erez Benjamin
Ion Beam Milling AJA Nirit Porecki Nirit Porecki
 
Micro-machining Femtosecond Laser ELAS Roy Davidi Roy Davidi
 
Lithography Photolithography MA6 Erez Benjamin Erez Benjamin
Photolithography MJB3 Dr. Boris Yofis Dr. Boris Yofis
Nano Imprint Lithogrpahy Nirit Porecki Nirit Porecki
Direct Laser Writer (mask and wafer) Heidelberg Anastasiia Adelberg Anastasiia Adelberg
E-Beam Lithography Raith 150 Inna Shekhtman Dolev Roitman
E-Beam Lithography Raith 150-II Inna Shekhtman Dolev Roitman
 
Ion Beam Helius 5 Dual Beam FIB ThermoFisher Roy Davidi Roy Davidi
 
Mask File Design Anastasiia Adelberg Anastasiia Adelberg
Mask Fabrication (Soda Lime substrate) Anastasiia Adelberg Anastasiia Adelberg
 
Back End Dicing Disco Saw Raz Samira Raz Samira
ATV Vacuum Oven 301 Gidon Jacob Gidon Jacob
Ball Wire bonder Nirit Porecki Bar Favelukis
Wedge Wire bonder Nirit Porecki Bar Favelukis
 
Characterization Profilometer KLA Erez Benjamin Erez Benjamin
Profilometer DETAK Dr. Gal Radovsky  Erez Benjamin
Ellipsometer Wollam Dr. Gal Radovsky  Dr. Gal Radovsky 
UV-VIS-NIR Spectrometer Lamda1050 Dr. Gal Radovsky  Dr. Gal Radovsky 
FTIR spectrometer Bruker Dr. Gal Radovsky  Dr. Gal Radovsky 
Confocal Microscope Olympus LEXT 4000 Erez Benjamin May Hayoun
Keithley Electrical Analyzer Anastasiia Adelberg May Hayoun
4 Point Probe Dr. Valery Garber May Hayoun
Contact Angle Nirit Porecki Roman Nudelman
NanoDrop Roman Nudelman Roman Nudelman
DLS (Zeta sizer/potential) Roman Nudelman Roman Nudelman
HRSEM ZEISS Gemini 300 Dr. Gal Radovsky  Dr. Gal Radovsky 
AFM Dr. Gal Radovsky  Dr. Gal Radovsky 
Raman Spectroscopy Dr. Gal Radovsky  Dr. Gal Radovsky 

 

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