System Owners

System Owners
Clean Room, TAU Center for Nanoscience and Nanotechnology

Technology Segment

Equipment Description

Nanocenter Owner

Tool Trainer

Deposition 

E-beam evaporator VST (Nano) Dr. Stanislav Stepanov Lev Rovinsky
E-beam evaporator VST (GB) Dr. Stanislav Stepanov Lev Rovinsky
Magnetron Sputtering Vinci  Dr. Stanislav Stepanov Dolev Roitman
Magnetron Sputtering PENTA  Dr. Valery Garber Eyal Nir
Diode Sputtering MRC  Gidon Jacob Gidon Jacob
Ebeam evaporator Vinci  Nirit Porecki Eyal Nir
PECVD PlasmTherm Dr. Valery Garber Erez Benjamin/Neta Melech 
ALD Beneq Inna Shekhtman Inna Shekhtman
RTP Nirit Porecki Nofar Livni
Electroplating Yamamoto Inna Shekhtman Eliran Hamo/Raz Samira

Etch 

RIE NEXTRAL  Dr. Valery Garber Erez Benjamin
RIE Oerlicon Dr. Boris Yofis Dr. Boris Yofis
Deep RIE SLR ICP Dr. Valery Garber Neta Melech 
Deep RIE Versaline DSE Dr. Valery Garber Erez Benjamin
Ion Beam Milling AJA  Nirit Porecki Nirit Porecki

Micro-machining

Femtosecond Laser ELAS  Dr. Stanislav Stepanov Dr. Stanislav Stepanov

Lithography

Photolithography MA6 Dr. Boris Yofis Erez Benjamin
Photolithography MJB3 Dr. Boris Yofis Dr. Boris Yofis
Nano Imprint Lithogrpahy Nirit Porecki Ella Borberg
Direct Laser Writer (mask and wafer) Heidelberg Stanislav Stepanov Stanislav Stepanov

Ion Beam 

E-Beam Lithography Raith 150 Inna Shekhtman Dolev Roitman
E-Beam Lithography Raith 150-II Inna Shekhtman Dolev Roitman
Helius 5 Dual Beam FIB ThermoFisher  Roy Davidi Roy Davidi

Mask

File Design

Dr. Stanislav Stepanov Dr. Stanislav Stepanov
Mask Fabrication (Soda Lime substrate) Dr. Stanislav Stepanov Dr. Stanislav Stepanov

Back End

Dicing Disco Saw Dr. Stanislav Stepanov Raz Samira
ATV Vacuum Oven 301 Gidon Jacob Gidon Jacob
Ball Wire bonder Dr. Stanislav Stepanov Dr. Stanislav Stepanov
Wedge Wire bonder Dr. Stanislav Stepanov Dr. Stanislav Stepanov

Characterization 

Profilometer KLA Dr. Gal Radovsky  Erez Benjamin
Profilometer DETAK Dr. Gal Radovsky  Erez Benjamin
Ellipsometer Wollam Dr. Stanislav Stepanov Dr. Stanislav Stepanov
UV-VIS-NIR Spectrometer Cary500i Dr. Gal Radovsky  Dr. Gal Radovsky 
FTIR spectrometer Bruker Dr. Gal Radovsky  Dr. Gal Radovsky 
Confocal Microscope Olympus LEXT 4000 Dr. Gal Radovsky  May Hayoun
Contact Angle Nirit Porecki Roman Nudelman
NanoDrop Dr. Stanislav Stepanov Roman Nudelman
DLS (Zeta sizer/potential) Dr. Stanislav Stepanov Roman Nudelman
HRSEM ZEISS Gemini 300 Dr. Gal Radovsky  Eliran Hamo
AFM Dr. Gal Radovsky  Dr. Gal Radovsky 
Raman Spectroscopy Dr. Gal Radovsky  Dr. Gal Radovsky 

 

Owners contact details

 

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