System Owners

Clean Room, TAU Center for Nanoscience and Nanotechnology

Technology Segment	Equipment Description	Nanocenter Owner	Tool Trainer
Deposition	E-beam evaporator VST (Nano)	Dr. Stanislav Stepanov	Lev Rovinsky
	E-beam evaporator VST (GB)	Dr. Stanislav Stepanov	Lev Rovinsky
	Magnetron Sputtering Vinci	Dr. Stanislav Stepanov	Dolev Roitman
	Magnetron Sputtering PENTA	Dr. Valery Garber	Eyal Nir
	Diode Sputtering MRC	Gidon Jacob	Gidon Jacob
	Ebeam evaporator Vinci	Nirit Porecki	Eyal Nir
	PECVD PlasmTherm	Dr. Valery Garber	Erez Benjamin/Neta Melech
	ALD Beneq	Inna Shekhtman	Inna Shekhtman
	RTP	Nirit Porecki	Nofar Livni
	Electroplating Yamamoto	Inna Shekhtman	Eliran Hamo/Raz Samira
Etch	RIE NEXTRAL	Dr. Valery Garber	Erez Benjamin
	RIE Oerlicon	Dr. Boris Yofis	Dr. Boris Yofis
	Deep RIE SLR ICP	Dr. Valery Garber	Neta Melech
	Deep RIE Versaline DSE	Dr. Valery Garber	Erez Benjamin
	Ion Beam Milling AJA	Nirit Porecki	Nirit Porecki
Micro-machining	Femtosecond Laser ELAS	Dr. Stanislav Stepanov	Dr. Stanislav Stepanov
Lithography	Photolithography MA6	Dr. Boris Yofis	Erez Benjamin
	Photolithography MJB3	Dr. Boris Yofis	Dr. Boris Yofis
	Nano Imprint Lithogrpahy	Nirit Porecki	Ella Borberg
	Direct Laser Writer (mask and wafer) Heidelberg	Stanislav Stepanov	Stanislav Stepanov
Ion Beam	E-Beam Lithography Raith 150	Inna Shekhtman	Dolev Roitman
	E-Beam Lithography Raith 150-II	Inna Shekhtman	Dolev Roitman
	Helius 5 Dual Beam FIB ThermoFisher	Roy Davidi	Roy Davidi
Mask	File Design	Dr. Stanislav Stepanov	Dr. Stanislav Stepanov
Mask	Mask Fabrication (Soda Lime substrate)	Dr. Stanislav Stepanov	Dr. Stanislav Stepanov
Back End	Dicing Disco Saw	Dr. Stanislav Stepanov	Raz Samira
	ATV Vacuum Oven 301	Gidon Jacob	Gidon Jacob
	Ball Wire bonder	Dr. Stanislav Stepanov	Dr. Stanislav Stepanov
	Wedge Wire bonder	Dr. Stanislav Stepanov	Dr. Stanislav Stepanov
Characterization	Profilometer KLA	Dr. Gal Radovsky	Erez Benjamin
	Profilometer DETAK	Dr. Gal Radovsky	Erez Benjamin
	Ellipsometer Wollam	Dr. Stanislav Stepanov	Dr. Stanislav Stepanov
	UV-VIS-NIR Spectrometer Cary500i	Dr. Gal Radovsky	Dr. Gal Radovsky
	FTIR spectrometer Bruker	Dr. Gal Radovsky	Dr. Gal Radovsky
	Confocal Microscope Olympus LEXT 4000	Dr. Gal Radovsky	May Hayoun
	Contact Angle	Nirit Porecki	Roman Nudelman
	NanoDrop	Dr. Stanislav Stepanov	Roman Nudelman
	DLS (Zeta sizer/potential)	Dr. Stanislav Stepanov	Roman Nudelman
	HRSEM ZEISS Gemini 300	Dr. Gal Radovsky	Eliran Hamo
	AFM	Dr. Gal Radovsky	Dr. Gal Radovsky
	Raman Spectroscopy	Dr. Gal Radovsky	Dr. Gal Radovsky