System Owners
|
Technology |
Equipment |
Nanocenter |
Tool |
|---|---|---|---|
| Deposition | E-beam evaporator VST (Nano) | Nirit Porecki | Edi Mados |
| E-beam evaporator VST (GB) | Nirit Porecki | Edi Mados | |
| Magnetron Sputtering Vinci | Sergio Bloch | Dolev Roitman | |
| Magnetron Sputtering PENTA | Sergio Bloch | Neta Melech | |
| Ebeam evaporator Vinci | Nirit Porecki | Dolev Roitman | |
| PECVD PlasmTherm | Sergio Bloch | Neta Melech | |
| ALD Beneq | Inna Shekhtman | Inna Shekhtman | |
| RTP | Nirit Porecki | Nofar Livni | |
| Electroplating Yamamoto | Inna Shekhtman | Raz Samira | |
| Etch | RIE NEXTRAL | Erez Benjamin | Erez Benjamin |
| RIE Oerlicon | Dr. Boris Yofis | Dr. Boris Yofis | |
| Deep RIE Versaline DSE | Erez Benjamin | Erez Benjamin | |
| Ion Beam Milling AJA | Nirit Porecki | Nirit Porecki | |
| Micro-machining | Femtosecond Laser ELAS | Roy Davidi | Roy Davidi |
| Lithography | Photolithography MA6 | Erez Benjamin | Erez Benjamin |
| Photolithography MJB3 | Dr. Boris Yofis | Dr. Boris Yofis | |
| Nano Imprint Lithogrpahy | Nirit Porecki | Nirit Porecki | |
| Direct Laser Writer (mask and wafer) Heidelberg | Anastasiia Adelberg | Anastasiia Adelberg | |
| E-Beam Lithography Raith 150 | Inna Shekhtman | Dolev Roitman | |
| E-Beam Lithography Raith 150-II | Inna Shekhtman | Dolev Roitman | |
| Ion Beam | Helius 5 Dual Beam FIB ThermoFisher | Roy Davidi | Roy Davidi |
| Mask | File Design | Anastasiia Adelberg | Anastasiia Adelberg |
| Mask Fabrication (Soda Lime substrate) | Anastasiia Adelberg | Anastasiia Adelberg | |
| Back End | Dicing Disco Saw | Raz Samira | Raz Samira |
| ATV Vacuum Oven 301 | Gidon Jacob | Gidon Jacob | |
| Ball Wire bonder | Nirit Porecki | Bar Favelukis | |
| Wedge Wire bonder | Nirit Porecki | Bar Favelukis | |
| Characterization | Profilometer KLA | Erez Benjamin | Erez Benjamin |
| Profilometer DETAK | Dr. Gal Radovsky | Erez Benjamin | |
| Ellipsometer Wollam | Dr. Gal Radovsky | Dr. Gal Radovsky | |
| UV-VIS-NIR Spectrometer Lamda1050 | Dr. Gal Radovsky | Dr. Gal Radovsky | |
| FTIR spectrometer Bruker | Dr. Gal Radovsky | Dr. Gal Radovsky | |
| Confocal Microscope Olympus LEXT 4000 | Erez Benjamin | May Hayoun | |
| Keithley Electrical Analyzer | Anastasiia Adelberg | May Hayoun | |
| 4 Point Probe | Dr. Valery Garber | May Hayoun | |
| Contact Angle | Nirit Porecki | Roman Nudelman | |
| NanoDrop | Roman Nudelman | Roman Nudelman | |
| DLS (Zeta sizer/potential) | Roman Nudelman | Roman Nudelman | |
| HRSEM ZEISS Gemini 300 | Dr. Gal Radovsky | Dr. Gal Radovsky | |
| AFM | Dr. Gal Radovsky | Dr. Gal Radovsky | |
| Raman Spectroscopy | Dr. Gal Radovsky | Dr. Gal Radovsky | |
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