Prof. Viacheslav[Slava] Krylov

Micro and nanoelectromechanical systems (MEMS/NEMS), micro- and nano sensors and actuators



My research in the area of design and modeling of micro- and nanoelectromechanical systems (MEMS/NEMS) combines theoretical and applied aspects.


The overall scope is in the development of new approaches to actuation and sensing and their implementation in micro devices such as electrostatically, magnetically and thermally actuated parametrically excited resonators, inertial, mass, bio and chemical sensors, tilting mirrors, bistable and multistable devices, polymeric MEMS.


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