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Clean Room, The Jan Koum Center for Nanoscience and Nanotechnology
Technology
Segment
Equipment
Description
Nanocenter
Owner
Tool
Trainer
Deposition
E-beam evaporator VST
Nirit Porecki
Edi Mados
Magnetron Sputtering Vinci
Nirit Porecki
Dafna meltser
Magnetron Sputtering PENTA
Erez Benjamin
Edi Mados
Ebeam evaporator Vinci
Nirit Porecki
Dafna meltser
PECVD PlasmTherm
Erez Benjamin
Erez Benjamin
ALD Beneq
Inna Shekhtman
Inna Shekhtman
RTP
Nirit Porecki
Nirit Porecki
Electroplating Yamamoto
Dr. Boris Yofis
Roy Marrache
Etch
RIE Oerlicon
Dr. Boris Yofis
Dr. Boris Yofis
Deep RIE Versaline DSE
Erez Benjamin
Erez Benjamin
Ion Beam Milling AJA
Nirit Porecki
Nirit Porecki
Micro-machining
Femtosecond Laser ELAS
Dr Anastasia
Adelberg
Nicole Gorokhovsky
Lithography
Photolithography MA6/BA
Erez Benjamin
Dafna meltser
Direct Laser Writer (mask and wafer) Heidelberg
Inna Shekhtman
Inna Shekhtman
E-Beam Lithography Raith 150-II
Inna Shekhtman
Inna Shekhtman
Ion Beam
Helius 5 Dual Beam FIB ThermoFisher
Dr. Alex Lahav
Maria Tkachev
Mask
File Design
Inna Shekhtman
Inna Shekhtman
Mask Fabrication (Soda Lime substrate)
Inna Shekhtman
Inna Shekhtman
Back End
Dicing Disco Saw
Bar Favelukis
Bar Favelukis
ATV Vacuum Oven 301
Gidon Jacob
Gidon Jacob
Characterization
XRD
Dr. David Levy
Dr. David Levy
XPS/AES
Dr. Pini Shekhter
Dr. Pini Shekhter
ESEM
Dr. Zahava Barkay
Dr. Zahava Barkay
HRSEM APREO Cathodoluminescence
Dr. Zahava Barkay
Dr. Zahava Barkay
TOF/SIMS
Dr. Alexander
Gladkikh
Dr. Alexander
Gladkikh
SPECTRA 200 S/TEM
Dr. George Levi
Dr. George Levi
TALOS F200i S/TEM
Dr. George Levi
Dr. George Levi
Profilometer KLA
Erez Benjamin
Erez Benjamin
Profilometer DETAK
Dr. Boris Yofis
Dr. Boris Yofis
Ellipsometer Wollam
Inna Shekhtman
Inna Shekhtman
UV-VIS-NIR Spectrometer Lamda1050
Dr. David Levy
Dr. David Levy
Confocal Microscope Olympus LEXT 5100
Erez Benjamin
Raz Smira
FTIR spectrophotometer
Dr. David Levy
Dr. David Levy
I-V/C-V meter Keithley 4210
Dr. Valery Garber
Bar Favelukis
4 Point Probe
Dr. Valery Garber
Dr. Valery Garber
Contact Angle
Nicole Gorokhovsky
Nicole Gorokhovsky
DLS (Zeta sizer/potential)
Nicole Gorokhovsky
Nicole Gorokhovsky
HRSEM ZEISS Gemini 300
Dr. Pini Shekhter
Gil Daffan
AFM
Dr Anastasia
Adelberg
Yiftach K
Raman Spectroscopy
Dr Anastasia
Adelberg
Dr Anastasia
Adelberg
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