System Owners

Clean Room, TAU Center for Nanoscience and Nanotechnology

Technology Segment	Equipment Description	Nanocenter Owner	Tool Trainer
Deposition	E-beam evaporator VST (Nano)	Nirit Porecki	Edi Mados
	Magnetron Sputtering Vinci	Nirit Porecki	Dolev Roitman
	Magnetron Sputtering PENTA	Dr. Valery Garber	Edi Mados
	Ebeam evaporator Vinci	Nirit Porecki	Dolev Roitman
	PECVD PlasmTherm	Dr. Gregory Kopnov	Lev Rovinsky
	ALD Beneq	Dr. Gregory Kopnov	Lev Rovinsky
	RTP	Nirit Porecki	Nirit Porecki
	Electroplating Yamamoto	Dr. Boris Yofis	Roy Marrache

Etch	RIE NEXTRAL	Erez Benjamin	Erez Benjamin
	RIE Oerlicon	Dr. Boris Yofis	Dr. Boris Yofis
	Deep RIE Versaline DSE	Erez Benjamin	Erez Benjamin
	Ion Beam Milling AJA	Nirit Porecki	Nirit Porecki

Micro-machining	Femtosecond Laser ELAS	Dr Anastasia Adelberg	Dr Anastasia Adelberg

Lithography	Photolithography MA6/BA	Erez Benjamin	Erez Benjamin
	Nano Imprint Lithogrpahy	Nirit Porecki	Nirit Porecki
	Direct Laser Writer (mask and wafer) Heidelberg	Inna Shekhtman	Inna Shekhtman
	E-Beam Lithography Raith 150	Inna Shekhtman	Dolev Roitman
	E-Beam Lithography Raith 150-II	Inna Shekhtman	Dolev Roitman

Ion Beam	Helius 5 Dual Beam FIB ThermoFisher	Dr. Alex Lahav	Dr. Alex Lahav

Mask	File Design	Inna Shekhtman	Inna Shekhtman
Mask	Mask Fabrication (Soda Lime substrate)	Inna Shekhtman	Inna Shekhtman

Back End	Dicing Disco Saw	Bar Favelukis	Bar Favelukis
	ATV Vacuum Oven 301	Gidon Jacob	Gidon Jacob
	Ball Wire bonder	Nirit Porecki	Bar Favelukis
	Wedge Wire bonder	Nirit Porecki	Bar Favelukis

Characterization	XRD	Dr. David Levy	Dr. David Levy
	XPS/AES	Dr. Pini Shekhter	Dr. Pini Shekhter
	ESEM	Dr. Zahava Barkay	Dr. Zahava Barkay
	HRSEM APREO Cathodoluminescence	Dr. Zahava Barkay	Dr. Zahava Barkay
	TOF/SIMS	Dr. Alexander Gladkikh	Dr. Alexander Gladkikh
	S/TEM SPECTRA	Dr. George Levi	Dr. George Levi
	TEM TALOS	Dr. George Levi	Dr. George Levi
	Profilometer KLA	Erez Benjamin	Erez Benjamin
	Profilometer DETAK	Dr. Boris Yofis	Dolev Roitman
	Ellipsometer Wollam	Dr. Gregory Kopnov	Gregory Kopnov
	UV-VIS-NIR Spectrometer Lamda1050	Dr. David Levy	Dr. David Levy
	Confocal Microscope Olympus LEXT 3000	Erez Benjamin	Erez Benjamin
	FTIR spectrophotometer	Dr. David Levy	Ori Avayu
	I-V/C-V meter Keithley 4210	Dr. Valery Garber	Dr. Valery Garber
	4 Point Probe	Dr. Valery Garber	Dr. Valery Garber
	Contact Angle	Nicole Gorokhovsky	Nicole Gorokhovsky
	NanoDrop	Nicole Gorokhovsky	Nicole Gorokhovsky
	DLS (Zeta sizer/potential)	Nicole Gorokhovsky	Nicole Gorokhovsky
	HRSEM ZEISS Gemini 300	Dr. Pini Shekhter	Adam Cohen
	AFM	Dr Anastasia Adelberg	Dr Anastasia Adelberg
	Raman Spectroscopy	Dr Anastasia Adelberg	Dr Anastasia Adelberg