Safety
Safety
Emergency Numbers
03-640-5555 Security
03-640-8222 Security Emergency
03-640-7707 Medical Emergency
03-640-9499 Nano Clean Room
03-640-6976 Eng Clean Room
03-640-5326 Lab number: 301 (Eng)
Please read the: "how to become a new user" and follow instructions.
Safety training – registration form (New!)
(Required for 1st time users)
Safety Introduction Presentations and Questionnaire
Clean Room Safety - English Edition
Clean Room Safety - Questionnaire
Safety Refresher Presentation
HF burn management review artical
Experimenting with Danger – video from the U.S. Chemical Safety Board website
Working in the clean room while being pregnant
Material Safety Data Sheet - MSDS
*Introducing new materials into the clean room or other MNCF facilities (glove box lab and 301) requires personnel approval and MSDS submission. Different chemicals can be used in the clean rooms than in the other labs.
| Photoresists | Developers | Acids | Bases | Gases | MISC |
|
AZ 5214 resist AZ 1505 resist AZ 1518 resist AZ 4562 resist |
AZ400K developer AZ726 developer |
HF Nitric Acid Phosphoric Acid BOE Sulfuric Acid Hydrochloric Acid (HCl) Acrylic Acid |
Sodium Hydroxide |
NH3 Silane |
Hydrogen Peroxide (H2O2) DPA
Rodamin 6G NN'-Methylenebisacrylamide Potassium Peroxydiasulfate PdOEP Ammonium Peroxydisulfate |
|
LOR A series LOR B series PMGI SF series
|
Chrome Etch Ti Etch Cu Etachnt (CE-100, CE-200) Gold Etachant |
TDBC
PEDOT PEDOT:PSS Fmoc PNA G monomer Fmoc PNA C monomer Poly(3,4-ethylenedioxythiophene)- poly(styrenesulfonate) Waferbond Remover |
|||
|
SU8-2000 series SU8-3000 series |
Ammonium Fluoride Ammonium Biflouride |
PVDF | |||
|
|
Nano Strip (H2SO4 + H2SO5 + H2O2 + H2O) |
