Safety Introduction Presentations


Emergency Numbers

03-640-5555  Security

03-640-8222  Security Emergency

03-640-7707  Medical Emergency

03-640-9499  Nano Clean Room

03-640-6976  Eng Clean Room

03-640-5326  Lab number: 301 (Eng)

Please read the: "how to become a new user" and follow instructions. 


Safety training – registration form (New!)


(Required for 1st time users)


Safety Introduction Presentations and Questionnaire 


Clean Room Safety - English Edition


Clean Room Safety - Questionnaire


Safety Refresher Presentation


Safety refresher 2018


HF burn management review artical




Experimenting with Danger – video from the U.S. Chemical Safety Board website


Working in the clean room while being pregnant


Material Safety Data Sheet - MSDS 

*Introducing new materials into the clean room or other MNCF facilities (glove box lab and 301) requires personnel approval and MSDS submission. Different chemicals can be used in the clean rooms than in the other labs.


Piranah use manual (SOP)


Photoresists Developers Acids Bases Gases  MISC

AZ 5214 resist 

AZ 1505 resist

AZ 1518 resist

AZ 4562 resist

AZ400K developer

AZ726 developer


Nitric Acid

Phosphoric Acid


Sulfuric Acid

Hydrochloric Acid (HCl)

Acrylic Acid

Sodium Hydroxide



Hydrogen Peroxide (H2O2)




Rodamin 6G


Potassium Peroxydiasulfate


Ammonium Peroxydisulfate

LOR A series

LOR B series

PMGI SF series



Chrome Etch

Ti Etch

Cu Etachnt (CE-100, CE-200)

Gold Etachant






Fmoc PNA G monomer

Fmoc PNA C monomer

Poly(3,4-ethylenedioxythiophene)- poly(styrenesulfonate) 

Waferbond Remover 

SU8-2000 series

SU8-3000 series


Ammonium Fluoride

Ammonium Biflouride




Nano Strip

(H2SO4 + H2SO5 + H2O2 + H2O)



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