Industry Pricelist

 

#

System

 

Industry

 

Tool  NIS/hr

Staff  NIS/hr

System Owner

Deposition

1

Ebeam Evaporator VST (Nano) 480* 480 Nirit Porecki

2

Magnetron Sputtering Vinci 480* 480 Nirit Porecki

3

Magnetron Sputtering PENTA 480* 480 Valery Garber

4

Ebeam Evaporator Vinci 

480* 480 Nirit Porecki

5

PECVD PlasmTherm

480 480

Dr. Gregory Kopnov

6

ALD Beneq

480 480 Dr. Gregory Kopnov

7

RTP

480 480 Nirit Porecki

8

Electroplating Yamamoto

480 480 Dr. Boris Yofis

Etch

9

RIE Oerlicon

480 480 Dr. Boris Yofis

10

Deep RIE Versaline DSE

480 480 Erez Benjamin

11

Ion Beam Milling AJA 

480 480 Nirit Porecki

Micro-Machining

12

Femtosecond Laser ELAS

480 480 Dr. Anastasia Adelberg

Lithography

13 E-Beam Lithography Raith 150-I 480* 480

Inna Shekhtman

14

E-Beam Lithography Raith 150-II

480* 480 Inna Shekhtman
15

Photolithography MA6/BA

480 480 Erez Benjamin
16

Nano Imprint Lithogrpahy

480 480 Nirit Porecki
17

Direct Laser Writer (wafer and mask) Heidelberg

480 480 Dr. Anastasia Adelberg

Back End

18

Dicing Disco Saw

480 480 Bar Favelukis
19

ATV Vacuum Oven 301

260 480 Gidon Jacob
20

Ball Wire Bonder

480 480 Bar Favelukis
21

Wedge Wire bonder

480 480 Bar Favelukis

Fabrication Metrology

22

Profilometer KLA

260 480 Erez Benjamin
23

Profilometer DETAK

260 480 Dr. Boris Yofis
24 Confocal Microscope Olympus LEXT 5100 260 480 Erez Benjamin
25

I-V/C-V Meter Keithley 4210

480 480 Dr. Anastasia Adelberg
26

Ellipsometer Woollam

480 480 Dr. Gregory Kopnov

Ion & Electron Microscopy

27

Helius 5 Dual Beam FIB ThermoFisher

480** 480 Dr. Alex Lahav
28

HRSEM ZEISS Gemini 300

480 480 Dr. Pini Shekhter
29

ESEM

840 Dr. Zahava Barkay
30

HRSEM Apreo Cathodoluminescence 

960 Dr. Zahava Barkay
31

TEM Talos F200i

880 Dr. George Levi
32 TEM SPECTRA 1200 Dr. George Levi

Material Analysis

33

XRD

550 Dr. David Levy
34

XPS/AES

880 Dr. Pini Shekhter
35 TOF/SIMS

1100

Dr. Alexander Gladkikh
36 UV-VIS-NIR Spectrometer Lamda 1050 480 480 Dr. David Levy
37 FTIR Spectrophotometer 400 480 Dr. David Levy
38

Contact Angle

260 480 Nicole Gorokhovsky
39

NanoDrop

260 480 Nicole Gorokhovsky
40

DLS (Zeta sizer/potential)

260 480 Nicole Gorokhovsky
41

AFM Parks NX10

480 480 Anastasia Adelberg
42

AFM Parks NX12

480 480 Anastasia Adelberg
43

Raman Spectroscopy

480 480 Anastasia Adelberg

Mask

44

File Design

N/A 480 Anastasia Adelberg
45

Mask Fabrication (Soda Lime substrate)

*details bellow Anastasia Adelberg

 

* Industry

Size

HR

LR

4" 2,700 1,925
5" 3,900 2,550

 

Additional Information:

*EBL resist and metals deposition for additional fee per used quantity

** FIB consumable material might have additional fee, per specific cost
 

  • Minimum billing time: 30 minutes.
  • Clean room entrance fee 200 NIS
  • Glove Box room entrance fee 200 NIS
    • Clean room entrance fees cover: CR gowning, chemical benches, photoresist, optical microscopies, plasma ashers, hot plates, and 4pp measurements
    • EBL entrance fees cover: chemical benches, photoresist, optical microscopies, plasma ashers
    • Glove Box room entrance fees cover: GB maintanance and operation (Liquid N2)
    • Other equipment  is charged per actual usege, in addition to clean room time.
    • Mask price is based on substrate material area, mask patterned area, requested resolution and is fixed price for all masks with similar parameters
       
  • How to Become a Self-Operating User:
    • Issue a blanket order for safety introduction and equipment training
    • Safety introduction for self-operating users from industry and academia: 200 NIS
    • Follow instructions on Nanocneter website: https://nano.tau.ac.il/mncf/Independent-users
 
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