Industry Pricelist

 

#

System

 

Industry

 

Tool  NIS/hr

Staff  NIS/hr

System Owner

Deposition

1

Ebeam Evaporator VST (Nano) 480* 480 Sergio Bloch

2

Ebeam Evaporator VST (GB) 480* 480 Sergio Bloch

3

Magnetron Sputtering Vinci 480* 480 Sergio Bloch

4

Magnetron Sputtering PENTA 480* 480 Sergio Bloch

6

Ebeam Evaporator Vinci 

480* 480 Sergio Bloch

7

PECVD PlasmTherm

480 480 Sergio Bloch

8

ALD Beneq

480 480 Inna Shekhtman

9

RTP

480 480 Nirit Porecki

10

Electroplating Yamamoto

480 480 Dr. Boris Yofis

Etch

11

RIE NEXTRAL 480 480 Erez Benjamin

12

RIE Oerlicon

480 480 Dr. Boris Yofis

13

Deep RIE Versaline DSE

480 480 Erez Benjamin

14

Ion Beam Milling AJA 

480 480 Nirit Porecki

Micro-Machining

15

Femtosecond Laser ELAS

480 480 Dr. Anastasia Adelberg

Lithography

16 E-Beam Lithography Raith 150-I 480* 480

Inna Shekhtman

17

E-Beam Lithography Raith 150-II

480* 480 Inna Shekhtman
18

Photolithography MA6/BA

480 480 Erez Benjamin
20

Nano Imprint Lithogrpahy

480 480 Nirit Porecki
21

Direct Laser Writer (wafer and mask) Heidelberg

480 480 Dr. Anastasia Adelberg

Back End

22

Dicing Disco Saw

480 480 Bar Favelukis
23

ATV Vacuum Oven 301

260 480 Gidon Jacob
24

Ball Wire Bonder

480 480 Bar Favelukis
25

Wedge Wire bonder

480 480 Bar Favelukis

Fabrication Metrology

26

Profilometer KLA

260 480 Erez Benjamin
27

Profilometer DETAK

260 480 Dr. Boris Yofis
28

I-V/C-V Meter Keithley 4210

480 480 Dr. Anastasia Adelberg
29

Ellipsometer Woollam

480 480 Sergio Bloch

Ion & Electron Microscopy

30

Helius 5 Dual Beam FIB ThermoFisher

480** 480 Dr. Alex Lahav
31

HRSEM ZEISS Gemini 300

480 480 Dr. Pini Shekhter
32

ESEM

840 Dr. Zahava Barkay
33

HRSEM Apreo Cathodoluminescence 

960 Dr. Zahava Barkay
34

TEM Talos F200i

610 270 Dr. George Levi
35 TEM (SPECTRA) coming soon (Q423) Dr. George Levi

Material Analysis

36

XRD

550 Dr. David Levy
37

XPS/AES

880 Dr. Pini Shekhter
38 TOF/SIMS

960

Dr. Alexander Gladkikh
39 UV-VIS-NIR Spectrometer Lamda 1050 480 480 Dr. David Levy
40 FTIR Spectrophotometer 400 480 Dr. David Levy
41

Contact Angle

260 480 Nicole Gorokhovsky
42

NanoDrop

260 480 Nicole Gorokhovsky
43

DLS (Zeta sizer/potential)

260 480 Nicole Gorokhovsky
44

AFM

Coming soon (Q323) 480 Anastasia Adelberg
45

Raman Spectroscopy

480 480 Anastasia Adelberg

Mask

46

File Design

N/A 480 Anastasia Adelberg
47

Mask Fabrication (Soda Lime substrate)

*details bellow Anastasia Adelberg

 

* Industry

Size

HR

LR

4" 2,700 1,925
5" 3,900 2,550

 

Additional Information:

*EBL resist and metals deposition for additional fee per used quantity

** FIB consumable material might have additional fee, per specific cost
 

  • Minimum billing time: 30 minutes.
  • Clean room entrance fee 200 NIS
  • Glove Box room entrance fee 200 NIS
    • Clean room entrance fees cover: CR gowning, chemical benches, photoresist, optical microscopies, plasma ashers, hot plates, and 4pp measurements
    • EBL entrance fees cover: chemical benches, photoresist, optical microscopies, plasma ashers
    • Glove Box room entrance fees cover: GB maintanance and operation (Liquid N2)
    • Other equipment  is charged per actual usege, in addition to clean room time.
    • Mask price is based on substrate material area, mask patterned area, requested resolution and is fixed price for all masks with similar parameters
       
  • How to Become a Self-Operating User:
    • Issue a blanket order for safety introduction and equipment training
    • Safety introduction for self-operating users from industry and academia: 200 NIS
    • Follow instructions on Nanocneter website: https://nano.tau.ac.il/mncf/Independent-users
 
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