Industry Pricelist

 

#

System

 

Industry

 

Tool  NIS/hr

Staff  NIS/hr

System Owner

Deposition

1

Ebeam evaporator VST (Nano) 480* 480 Sergio Bloch

2

Ebeam evaporator VST (GB) 480* 480 Sergio Bloch

3

Magnetron Sputtering Vinci 480* 480 Sergio Bloch

4

Magnetron Sputtering PENTA 480* 480 Sergio Bloch

5

Diode Sputtering MRC

480*

480 Gidon Jacob

6

Ebeam evaporator Vinci 

480* 480 Sergio Bloch

7

PECVD PlasmTherm

480 480 Sergio Bloch

8

ALD Beneq

480 480 Inna Shekhtman

9

RTP

480 480 Nirit Porecki

10

Electroplating Yamamoto

480 480 Dr. Boris Yofis

Etch

11

RIE NEXTRAL 480 480 Dr. Valery Garber

12

RIE Oerlicon

480 480 Dr. Boris Yofis

13

Deep RIE Versaline DSE

480 480 Dr. Valery Garber

14

Ion Beam Milling AJA 

480 480 Nirit Porecki

Micro-Machining

15

Femtosecond Laser ELAS

480 480 Roy Davidi

Lithography

16 E-Beam Lithography Raith 150-I 480* 480

Inna Shekhtman

17

E-Beam Lithography Raith 150-II

480* 480 Inna Shekhtman
18

Photolithography MA6/BA

480 480 Erez Binyamin
20

Nano Imprint Lithogrpahy

480 480 Nirit Porecki
21

Direct Laser Writer (wafer and mask) Heidelberg

480 480 Anastasiia Adelberg

Back End

22

Dicing Disco Saw

480 480 Raz Samira
23

ATV Vacuum Oven 301

260 480 Gidon Jacob
24

Ball Wire bonder

480 480 Roman Nudelman
25

Wedge Wire bonder

480 480 Roman Nudelman
26 I-V/C-V Meter Keithley 480 480

Anastasiia Adelberg

Characterization

27

Helius 5 Dual Beam FIB ThermoFisher

480** 480 Roy Davidi
28 HRSEM ZEISS Gemini 300 480 480 Dr. Pini Shekhter
29

XRD

550 Dr. David Levy
30

XPS/AES

880 Dr. Pini Shekhter
31

ESEM

840 Dr. Zahava Barkay
32 HRSEM Apreo Cathodoluminescence  coming soon (Q323) Dr. Zahava Barkay
33 TOF/SIMS

960

Dr. Alexander Gladkikh
34

TEM (Talos F200i)

coming soon (Q323) Dr. George Levi
35

TEM (SPECTRA)

coming soon (Q423)

Dr. George Levi
36

Profilometer KLA

260 480 Erez Binyamin
37

Profilometer DETAK

260 480 Dr. Boris Yofis
38

Ellipsometer Woollam

480 480 Sergio Bloch
39 UV-VIS-NIR Spectrometer Lamda 1050 480 480 Anastasia Adelberg
41

Confocal Microscope Olympus LEXT 4000

260 480 Erez Binyamin
42 FTIR spectrophotometer 400 480 Dr. Valery Garber
42

Contact Angle

260 480 Nicole Gorokhovsky
43

NanoDrop

260 480 Nicole Gorokhovsky
44

DLS (Zeta sizer/potential)

260 480 Nicole Gorokhovsky
45

AFM

Coming soon (Q323) 480 Anastasia Adelberg
46

Raman Spectroscopy

480 480 Anastasia Adelberg

Mask

47

File Design

N/A 480 Anastasia Adelberg
48

Mask Fabrication (Soda Lime substrate)

*details bellow Anastasia Adelberg

 

* Industry

Size

HR

LR

4" 2,700 1,925
5" 3,900 2,550

 

Additional Information:

*EBL resist and metals deposition for additional fee per used quantity

** FIB consumable material might have additional fee, per specific cost
 

  • Minimum billing time: 30 minutes.
  • Clean room entrance fee 200 NIS
  • Glove Box room entrance fee 200 NIS
    • Clean room entrance fees cover: CR gowning, chemical benches, photoresist, optical microscopies, plasma ashers, hot plates, and 4pp measurements
    • EBL entrance fees cover: chemical benches, photoresist, optical microscopies, plasma ashers
    • Glove Box room entrance fees cover: GB maintanance and operation (Liquid N2)
    • Other equipment  is charged per actual usege, in addition to clean room time.
    • Mask price is based on substrate material area, mask patterned area, requested resolution and is fixed price for all masks with similar parameters
       
  • How to Become a Self-Operating User:
    • Issue a blanket order for safety introduction and equipment training
    • Safety introduction for self-operating users from industry and academia: 200 NIS
    • Follow instructions on Nanocneter website: https://nano.tau.ac.il/mncf/Independent-users
 
Tel Aviv University makes every effort to respect copyright. If you own copyright to the content contained
here and / or the use of such content is in your opinion infringing, Contact us as soon as possible >>