*EBL resist and metals deposition for additional fee per used quantity
- Minimum billing time: 30 minutes.
- Clean room entrance fee 200 NIS
- Glove Box room entrance fee 200 NIS
- Clean room entrance fees cover: CR gowning, chemical benches, photoresist, optical microscopies, plasma ashers, hot plates, and 4pp measurements
- EBL entrance fees cover: chemical benches, photoresist, optical microscopies, plasma ashers
- Glove Box room entrance fees cover: GB maintanance and operation (Liquid N2)
- Other equipment is charged per actual usege, in addition to clean room time.
- Mask price is based on substrate material area, mask patterned area, requested resolution and is fixed price for all masks with similar parameters
- How to Become a Self-Operating User:
- Issue a blanket order for safety introduction and equipment training
- Safety introduction for self-operating users from industry and academia: 200 NIS
- Follow instructions on Nanocneter website: https://nano.tau.ac.il/mncf/Independent-users