Dual Beam FIB and HR-SEM, Helios 5 UC

Manufacturer and model:  ThermoFisher, Dual Beam Helios 5 UC

Description:

The Helios 5 UC is an integrated focused ion beam ‘FIB’ (Ga+) and scanning electron beam (SEM), dual functionality in one machine. The ion column provides fast and precise milling, patterning and imaging of the sample's surface.

The superior low voltage performance of the ion column facilitates to produce a high-quality thin lamella for TEM.

A Multi-Chem system provides an accurate deposition/etching capability of different layers on the sample. By applying a simultaneous operation of the columns, it is possible to slice the sample very gently and to acquit an immediate SEM image of the slice. By repeating these steps, it is possible to reconstruct a 3D model of the specimen.