Helius 5 Dual Beam FIB ThermoFisher

Helius 5 Dual Beam FIB ThermoFisher
Helius 5 Dual Beam FIB ThermoFisher
Manufacturer and model:

ThermoFisher Helios 5 UC.



The Helios 5 is an integrated focused ion beam (FIB) and scanning electron beam, dual functionality in one machine. The ion column provides fast and precise milling, patterning and imaging of the sample's surface. 


The superior low voltage performance of the ion column facilitates to produce a high-quality thin lamella for TEM.


A Multi-Chem system provides an accurate deposition/etching capability of different layers on the sample. By applying a simultaneous operation of the columns, it is possible to slice the sample very gently and to acquite an immediate SEM image of the slice. By repeating these steps, it is possible to reconstruct a 3D model of the specimen.



  • ION optics - Tomahawk HT Ion Column with superior high-current performance.
    •  Ion beam current range: 1pA - 100nA.
    • Accelerating voltage range: 500V - 30kV.


  • Electron optics - Elstar ultra-high-resolution field emission SEM column with Magnetic immersion objective lens.
    • Resolution: 0.6 nm at 15 kV, 1.5 nm at 1 kV with beam deceleration and DBS.
    • Electron beam current range: 0.8pA to 176nA.
    • Landing energy range: 20eV - 30keV.
    • Maximum horizontal field width: 2.3mm at 4mm WD.


  • Among the capabilities of the Helios 5 are:
    • TEM Lamella preparation.
    • Cross section preparation - Obtaining HRSEM images and EDS measurements.
    • Patterning with Ion beam - working with BMP and GDS file or for simple patterning directly on the tool.
    • Ion imaging.



Nano center building.


Tool Owner:

Roy Davidi (roydavidi@tauex.tau.ac.il)


Tool Trainer:

Roy Davidi (roydavidi@tauex.tau.ac.il)


Rates & Costs for external Commercial / Industrial:

Tool - 440 NIS / hr

Staff Time - 440 NIS / hr.

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