Dual Beam FIB and HR-SEM, Helios 5 UC

Manufacturer and model:  ThermoFisher, Dual Beam Helios 5 UC

Description:

The Helios 5 UC is an advanced focused ion beam machine (FIB) integrated with a high-resolution scanning electron microscope (SEM), offering dual beam FIB functionality for precise material processing and imaging. The ion column (Ga+) enables fast and accurate milling, patterning, and imaging, making it a powerful focused ion beam tool for nanofabrication and sample preparation.

With superior low-voltage ion performance, the system is particularly effective in producing high-quality thin lamellae for TEM analysis. The integrated Multi-Chem system enhances deposition and etching capabilities, allowing precise layer modifications on samples. Through simultaneous operation of the ion and electron columns, it enables gentle slicing and real-time SEM imaging, supporting 3D reconstruction of specimens.

This FIB analysis system is widely used for failure analysis services, defect localization, and advanced material research. Our focused ion beam service provides researchers and engineers with cutting-edge tools for in-depth microstructural investigations and device characterization