Mask Aligner MA6 GEN4

Mask Aligner MA6 GEN4
Mask Aligner MA6 GEN4
  • Description
  • Specification
  • Location & Tool Owner


Manufacturer and model:

KARL SUSS MA/BA6 GEN4 Mask Aligner.



The SUSS MA/BA6 mask aligner is widely recognized as a benchmark in semiconductor submicron research and microsystems production.


It is designed for all standard lithography applications and wafer sizes of up to 150 mm. For thick-resist MEMS applications, the MA/BA6 offers high resolution and optimum edge quality.


The bottom side alignment option allows for pattern printing on both sides of the substrate.

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