HRSEM ZEISS Gemini 300

Manufacturer and model:

 Zeiss GeminiSEM 300 – HRSEM.

Description:

A high-resolution field emission scanning electron microscope with a sub nanometer resolution equipped with a variety of detectors (Everhart-Thornley type as well as solid state) for the efficient detection of different signals emerging from the sample.

Backscattered electrons can be resolved according to their angular distribution as well as their energy.

For thin electron transparent samples, transmitted electrons can be detected as well and resolved according to their angular distribution.

The unique design of the Gemini column allows an efficient imaging at low beam energies without any compromise in resolution.

Specification:

• A low vacuum mode for the efficient imaging of non-conductive samples without any need for metal coating.
• The backscattered electron signal is available at low vacuum mode.
• An EDS detector - X-Flash 6/60 from Bruker.
• The system is based on a silicon drift detector (SDD), capable to handle very high count rates almost without sacrificing the spectral resolution.
• Improved spatial resolution by using a low KV.

​Location:

Nano center building, Room #28.

Tool Owner:

Dr. Pini Shekhter (shpini@tauex.tau.ac.il).

Tool Trainer:

Adam Cohen (adamc1@mail.tau.ac.il).