RTP

Manufacturer and model:

JIPELEC JETFIRST 100C.

Description:

Rapid Thermal Processing (RTP) is a high-speed thermal treatment method used to modify the electrical properties of wafers and samples. Our RTP tool utilizes rapid thermal annealing, applying intense lamp-based heating for short durations to ensure precise and controlled processing.

With our RTP machine, we achieve exceptional temperature accuracy, uniform heating, and high repeatability. This rapid thermal processing equipment is ideal for annealing, oxidation, and diffusion processes, essential for advanced microfabrication. The rapid heating and cooling cycles minimize wafer stress while enhancing surface diffusion, improving dopant activation and optimizing material properties.