PECVD PlasmTherm

PECVD PlasmTherm
PECVD PlasmTherm
  • Description
  • Specification
  • Location & Tool Owner


Manufacturer and model:

Plasma Enhanced CVD - PlasmaTh SLR790.



Plasma enhanced chemical vapor deposition providing low stressed silicon nitride, silicon dioxide and silicon oxynitride thin films.



SiO2 and SiNx.

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