PECVD PlasmTherm

PECVD PlasmTherm
PECVD PlasmTherm

 

Location:

Engineering Cleanroom, Wolfson building of Electrical Engineering.

 

Tool Owner:

Dr. Gregory Kopnov ( kopnov@tauex.tau.ac.il)

 

Tool Trainer:

Lev Rovinsky (levrovinsky@mail.tau.ac.il).

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