PECVD PlasmTherm
Location:
Engineering Cleanroom, Wolfson building of Electrical Engineering.
Tool Owner:
Erez Benjamin (erezbenj@tauex.tau.ac.il).
Tool Trainer:
Erez Benjamin (erezbenj@tauex.tau.ac.il).
Location:
Engineering Cleanroom, Wolfson building of Electrical Engineering.
Tool Owner:
Erez Benjamin (erezbenj@tauex.tau.ac.il).
Tool Trainer:
Erez Benjamin (erezbenj@tauex.tau.ac.il).