Ellipsometer Woollam

Ellipsometer Woollam
Ellipsometer Woollam

Manufacturer and model:

J.A. Woollam Co., Inc Spectroscopic Ellipsometers M-2000D.



The M-2000 is most commonly used to measure thin film thickness and optical constants. It is sensitive to less than a monolayer of material (sub-nm) on a surface and yet can determine thickness for transparent films up to tens of microns.



Wavelength Range: 193-1000nm, 500 wavelengths.

Angle Range:

  • Fixed Angle 65˚.
  • Horz. Auto Angle 45 ˚- 90˚.
  • Vert. Auto Angle 20 ˚- 90˚.

System Overview:  

Patented rotating compensator ellipsometry, simultaneous CCD detection of all wavelengths, flexible system integration.

Data Acquisition Rate:

Data collected 20 times per second. For optimal signal-to-noise, typical measurement times for full spectrum is between 0.5 and 5 seconds. 



Engineering Cleanroom, Wolfson building of Electrical Engineering.


Tool Owner:

Dr. Gregory Kopnov ( kopnov@tauex.tau.ac.il)


Tool Trainer:

Dr. Gregory Kopnov ( kopnov@tauex.tau.ac.il)

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