Ellipsometer Woollam
Manufacturer and model:
J.A. Woollam Co., Inc Spectroscopic Ellipsometers M-2000D.
Description:
The M-2000 is most commonly used to measure thin film thickness and optical constants. It is sensitive to less than a monolayer of material (sub-nm) on a surface and yet can determine thickness for transparent films up to tens of microns.
Specification:
Wavelength Range: 193-1000nm, 500 wavelengths.
Angle Range:
- Fixed Angle 65˚.
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Horz. Auto Angle 45 ˚- 90˚.
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Vert. Auto Angle 20 ˚- 90˚.
System Overview:
Patented rotating compensator ellipsometry, simultaneous CCD detection of all wavelengths, flexible system integration.
Data Acquisition Rate:
Data collected 20 times per second. For optimal signal-to-noise, typical measurement times for full spectrum is between 0.5 and 5 seconds.
Location:
Engineering Cleanroom, Wolfson building of Electrical Engineering.
Tool Owner:
Dr. Gregory Kopnov ( kopnov@tauex.tau.ac.il)
Tool Trainer:
Dr. Gregory Kopnov ( kopnov@tauex.tau.ac.il)
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