Profilometer KLA

Manufacturer and model:

The KLA-Tencor P-6 Stylus Profiles.

Description:

Stylus profilometer for measurements of surface roughness, film thickness and wafer stress analysis.

Common applications:

Photoresist thickness, deposited material thickness, etch depth, surface roughness, etc.

Specification:

• 2D surface topography measurements.
• Step height: Nanometers to 1000µm.
• Low force with constant force control: 0.5 to 50mg.
• The scan full diameter of the sample without stitching.
• Radius tip of 2 microns.
• Motorized stage up to 150mm.
• Vacuum holder.

​Location:

Engineering Cleanroom, Wolfson building of Electrical Engineering.

Tool Owner:

Erez Benjamin (erezbenj@mail.tau.ac.il).

Tool Trainer:

Erez Benjamin (erezbenj@mail.tau.ac.il).