Profilometer KLA

Profilometer KLA
Profilometer KLA
  • Description
  • Specification
  • Location & Tool Owner


Manufacturer and model:

The KLA-Tencor P-6 Stylus Profiles.



Stylus profilometer for measurements of surface roughness, film thickness and wafer stress analysis.


Common applications:

Photoresist thickness, deposited material thickness, etch depth, surface roughness, etc.

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