Profilometer KLA

Profilometer KLA
Profilometer KLA

Manufacturer and model:

The KLA-Tencor P-6 Stylus Profiles.

 

Description:

Stylus profilometer for measurements of surface roughness, film thickness and wafer stress analysis.

 

Common applications:

Photoresist thickness, deposited material thickness, etch depth, surface roughness, etc.

 

Specification:

  • 2D surface topography measurements.
  • Step height: Nanometers to 1000µm.
  • Low force with constant force control: 0.5 to 50mg.
  • The scan full diameter of the sample without stitching.
  • Radius tip of 2 microns.
  • Motorized stage up to 150mm.
  • Vacuum holder.


Location:

Engineering Cleanroom, Wolfson building of Electrical Engineering.

 

Tool Owner:

Erez Benjamin (erezbenj@mail.tau.ac.il).

 

Tool Trainer:

Erez Benjamin (erezbenj@mail.tau.ac.il).

 

Rates & Costs for external Commercial / Industrial:

Clean Room - 200 NIS / hr.

Tool - 240 NIS / hr.

Staff Time - 440 NIS / hr.

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