Profilometer KLA

Profilometer KLA
Profilometer KLA

Manufacturer and model:

The KLA-Tencor P-6 Stylus Profiles.



Stylus profilometer for measurements of surface roughness, film thickness and wafer stress analysis.


Common applications:

Photoresist thickness, deposited material thickness, etch depth, surface roughness, etc.



  • 2D surface topography measurements.
  • Step height: Nanometers to 1000µm.
  • Low force with constant force control: 0.5 to 50mg.
  • The scan full diameter of the sample without stitching.
  • Radius tip of 2 microns.
  • Motorized stage up to 150mm.
  • Vacuum holder.


Engineering Cleanroom, Wolfson building of Electrical Engineering.


Tool Owner:

Erez Benjamin (


Tool Trainer:

Erez Benjamin (

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