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Profilometer KLA
Profilometer KLA
Description
Specification
Location & Tool Owner
2D surface topography measurements.
Step height: Nanometers to 1000µm.
Low force with constant force control: 0.5 to 50mg.
The scan full diameter of the sample without stitching.
Radius tip of 2 microns.
Motorized stage up to 150mm.
Vacuum holder.
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