Profilometer DEKTAK
Manufacturer and model:
Veeco Dektak 6M Surface Profiler.
Description:
The Dektak 6M is a contact profilometer used for surface topography, waviness and roughness measurements. This tool can measure step height of thin films (~500Å to 100um), by a diamond-tip stylus that contacts the sample.
Specification:
- Vertical Range: ~500Å - 100um.
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Stylus: Diamond tip, 12.5μm radius.
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Stylus Tracking Force: 1mg – 15mg (software selectable).
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Sample Stage Size: up to 6” (150 mm) wafers.
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Max Sample thickness: 31.75 mm.
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Max Sample weight: 680gr.
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No liquids or uncured polymer, photoresist, or spin on films, are allowed.
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Providing 2D and 3D mapping.
Location:
Clean Room, Nano center building.
Tool Owner:
Dr. Gal Radovsky (galradovsky@tauex.tau.ac.il).
Tool Trainer:
Erez Benjamin (erezbenj@mail.tau.ac.il).
Rates & Costs for external Commercial / Industrial:
Clean Room – 200 NIS/hr.
Tool – 240 NIS/hr.
Staff Time – 440 NIS/hr.