Profilometer DEKTAK

Manufacturer and model:

Veeco Dektak 6M Surface Profiler.

Description:

The Dektak 6M is a contact profilometer used for surface topography, waviness and roughness measurements. This tool can measure step height of thin films (~500Å to 100um), by a diamond-tip stylus that contacts the sample.

Specification:

• Vertical Range: ~500Å - 100um.
• Stylus: Diamond tip, 12.5μm radius.
• Stylus Tracking Force: 1mg – 15mg (software selectable).
• Sample Stage Size: up to 6” (150 mm) wafers.
• Max Sample thickness: 31.75 mm.
• Max Sample weight: 680gr.
• No liquids or uncured polymer, photoresist, or spin on films, are allowed.
• Providing 2D and 3D mapping.

​Location:

Clean Room, Nano center building.

Tool Owner:

Dr. Gal Radovsky (galradovsky@tauex.tau.ac.il).

Tool Trainer:

Erez Benjamin (erezbenj@mail.tau.ac.il).

Rates & Costs for external Commercial / Industrial:

Clean Room – 200 NIS/hr.

Tool – 240 NIS/hr.

Staff Time – 440 NIS/hr.