Profilometer DEKTAK

Profilometer DEKTAK
Profilometer DEKTAK

Manufacturer and model:

Veeco Dektak 6M Surface Profiler.

 

Description:

The Dektak 6M is a contact profilometer used for surface topography, waviness and roughness measurements. This tool can measure step height of thin films (~500Å to 100um), by a diamond-tip stylus that contacts the sample.

 

Specification:

  • Vertical Range: ~500Å - 100um.
  • Stylus: Diamond tip, 12.5μm radius.
  • Stylus Tracking Force: 1mg – 15mg (software selectable).
  • Sample Stage Size: up to 6” (150 mm) wafers.
  • Max Sample thickness: 31.75 mm.
  • Max Sample weight: 680gr.
  • No liquids or uncured polymer, photoresist, or spin on films, are allowed.
  • Providing 2D and 3D mapping.


Location:

Clean Room, Nano center building.

 

Tool Owner:

Dr. Gal Radovsky (galradovsky@tauex.tau.ac.il).

 

Tool Trainer:

Erez Benjamin (erezbenj@mail.tau.ac.il).

 

Rates & Costs for external Commercial / Industrial:

Clean Room – 200 NIS/hr.

Tool – 240 NIS/hr.

Staff Time – 440 NIS/hr.

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