Profilometer DEKTAK

Profilometer DEKTAK
Profilometer DEKTAK

Manufacturer and model:

Veeco Dektak 6M Surface Profiler.



The Dektak 6M is a contact profilometer used for surface topography, waviness and roughness measurements. This tool can measure step height of thin films (~500Å to 100um), by a diamond-tip stylus that contacts the sample.



  • Vertical Range: ~500Å - 100um.
  • Stylus: Diamond tip, 12.5μm radius.
  • Stylus Tracking Force: 1mg – 15mg (software selectable).
  • Sample Stage Size: up to 6” (150 mm) wafers.
  • Max Sample thickness: 31.75 mm.
  • Max Sample weight: 680gr.
  • No liquids or uncured polymer, photoresist, or spin on films, are allowed.
  • Providing 2D and 3D mapping.


Clean Room, Nano center building.


Tool Owner:

Dr. Boris Yofis ( 


Tool Trainer:

Dolev Roitman (

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