Profilometer DEKTAK
- Vertical Range: ~500Å - 100um.
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Stylus: Diamond tip, 12.5μm radius.
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Stylus Tracking Force: 1mg – 15mg (software selectable).
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Sample Stage Size: up to 6” (150 mm) wafers.
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Max Sample thickness: 31.75 mm.
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Max Sample weight: 680gr.
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No liquids or uncured polymer, photoresist, or spin on films, are allowed.
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Providing 2D and 3D mapping.
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