E-beam Evaporator VST (Nano)
Manufacturer and model:
VST TFDS-680.
Description:
Capable of heating materials to high temperature, high purity film, very high deposition rates and evaporation of high temperature materials and refractory metals. Can evaporate high melting point materials.
Materials:
Au, Ag, Al, Co, Cr, Cu, In, Nb, Ni, Mo, Pd, Pt, Sn, Ta, Ti, W.
Specification:
- Up to 4‘’ wafers.
- Load lock.
- Rotating sample holder.
- Base pressure 5x10-7 Torr.
- Typical deposition rate: 0.5 Å/sec.
- Full wafer depostion
Location:
Clean Room, Nano center building.
Tool Owner:
Sergio Bloch (csebta@tauex.tau.ac.il).
Tool Trainer:
Edi Mados (ednamados@mail.tau.ac.il).