E-beam Evaporator VST (Nano)

E-beam Evaporator VST (Nano)
E-beam Evaporator VST (Nano)

Manufacturer and model:

VST TFDS-680.

 

Description:

Capable of heating materials to high temperature, high purity film, very high deposition rates and evaporation of high temperature materials and refractory metals. Can evaporate high melting point materials.

 

Materials: 

Au, Ag, Al, Co, Cr, Cu, In, Nb, Ni, Mo, Pd, Pt, Sn, Ta, Ti, W. 

 

Specification:

  • Up to 4‘’ wafers.
  • Load lock.
  • Rotating sample holder.
  • Base pressure 5x10-7 Torr.
  • 6 crucibles + 1 thermal source.
  • Typical deposition rate: 0.5 Å/sec.


Location:

Clean Room, Nano center building.

 

Tool Owner:

Nirit Porecki-Shamay (nporecki@tauex.tau.ac.il).

 

Tool Trainer:

Lev Rovinsky (levrovinsky@mail.tau.ac.il).

 

Rates & Costs for external Commercial / Industrial:

Clean Room - 200 NIS / hr.

Tool - 440 NIS / hr.

Staff Time - 440 NIS / hr.

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