E-beam Evaporator VST (Nano)

E-beam Evaporator VST (Nano)
E-beam Evaporator VST (Nano)

Manufacturer and model:




Capable of heating materials to high temperature, high purity film, very high deposition rates and evaporation of high temperature materials and refractory metals. Can evaporate high melting point materials.



Au, Ag, Al, Co, Cr, Cu, In, Nb, Ni, Mo, Pd, Pt, Sn, Ta, Ti, W. 



  • Up to 4‘’ wafers.
  • Load lock.
  • Rotating sample holder.
  • Base pressure 5x10-7 Torr.
  • Typical deposition rate: 0.5 Å/sec.
  • Full wafer depostion


Clean Room, Nano center building.


Tool Owner:

Sergio Bloch (csebta@tauex.tau.ac.il).


Tool Trainer:

Edi Mados (ednamados@mail.tau.ac.il).

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