Ion Beam Milling AJA

Manufacturer and model:

AJA International ATC-IM Ion Milling Systems.

Description:

Ion Milling is a physical etching technique whereby the ions of an inert gas are accelerated from a wide beam ion source into the surface of a substrate in a vacuum chamber in order to remove material to some desired depth or underlayer. 

Specification:

• K&R type beam generator.
• Providing large area collimated beam of neutralized ions.
• For physical sputtering of almost all materials.
• With automatic control of the incident angle between beam and substrate holder.

​Location:

Engineering Cleanroom, Wolfson building of Electrical Engineering.

Tool Owner:

Nirit Porecki-Shamay (nporecki@tauex.tau.ac.il).

Tool Trainer:

Nirit Porecki-Shamay (nporecki@tauex.tau.ac.il).