Ion Beam Milling AJA

Deep RIE Versaline DSE
Ion Beam Milling AJA
  • Description
  • Specification
  • Location & Tool Owner


Manufacturer and model:

AJA International ATC-IM Ion Milling Systems.



Ion Milling is a physical etching technique whereby the ions of an inert gas are accelerated from a wide beam ion source into the surface of a substrate in a vacuum chamber in order to remove material to some desired depth or underlayer. 

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