Ion Beam Milling AJA

Deep RIE Versaline DSE
Ion Beam Milling AJA

Manufacturer and model:

AJA International ATC-IM Ion Milling Systems.

 

Description:

Ion Milling is a physical etching technique whereby the ions of an inert gas are accelerated from a wide beam ion source into the surface of a substrate in a vacuum chamber in order to remove material to some desired depth or underlayer. 

 

Specification:

  • K&R type beam generator.
  • Providing large area collimated beam of neutralized ions.
  • For physical sputtering of almost all materials.
  • With automatic control of the incident angle between beam and substrate holder.

 

Location:

Engineering Cleanroom, Wolfson building of Electrical Engineering.

 

Tool Owner:

Nirit Porecki-Shamay (nporecki@tauex.tau.ac.il).

 

Tool Trainer:

Nirit Porecki-Shamay (nporecki@tauex.tau.ac.il).

 

Rates & Costs for external Commercial / Industrial:

Clean Room - 200 NIS / hr.

Tool - 440 NIS / hr.

Staff Time - 440 NIS / hr.

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