Ion Beam Milling AJA
Manufacturer and model:
AJA International ATC-IM Ion Milling Systems.
Description:
Ion Milling is a physical etching technique whereby the ions of an inert gas are accelerated from a wide beam ion source into the surface of a substrate in a vacuum chamber in order to remove material to some desired depth or underlayer.
Specification:
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K&R type beam generator.
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Providing large area collimated beam of neutralized ions.
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For physical sputtering of almost all materials.
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With automatic control of the incident angle between beam and substrate holder.
Location:
Engineering Cleanroom, Wolfson building of Electrical Engineering.
Tool Owner:
Nirit Porecki-Shamay (nporecki@tauex.tau.ac.il).
Tool Trainer:
Nirit Porecki-Shamay (nporecki@tauex.tau.ac.il).