Plasma Preen

Plasma Preen
Plasma Preen

Manufacturer and model:

Plasmatic Systems, Inc. Plasma Preen II #973.



Device and wafer surface cleaning treatments procedures, removal of organic residuals and native oxides.



  • Water cooled reactor with 9’’ x 7’’ x 3’’ Reaction Chamber.
  • Material: Pyrex & Aluminum.
  • Gas Supply: Argon and Oxygen.
  • 60Hz power.
  • Electrical Specifications: 120V, 60Hz.
  • Maximum Temperature: 200°C.
  • Temperature Range: 25° to 200°C.



Engineering Cleanroom, Wolfson building of Electrical Engineering.


Tool Owner:

Gidon Jacob (


Tool Trainer:

Erez Benjamin (

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