Plasma Preen

Manufacturer and model:

Plasmatic Systems, Inc. Plasma Preen II #973.

Description:

Device and wafer surface cleaning treatments procedures, removal of organic residuals and native oxides.

Specification:

• Water cooled reactor with 9’’ x 7’’ x 3’’ Reaction Chamber.
• Material: Pyrex & Aluminum.
• Gas Supply: Argon and Oxygen.
• 60Hz power.
• Electrical Specifications: 120V, 60Hz.
• Maximum Temperature: 200°C.
• Temperature Range: 25° to 200°C.

​Location:

Engineering Cleanroom, Wolfson building of Electrical Engineering.

Tool Owner:

Gidon Jacob (gjacob@tauex.tau.ac.il).

Tool Trainer:

Erez Benjamin (erezbenj@mail.tau.ac.il).