Plasma Preen

Plasma Preen
Plasma Preen

Manufacturer and model:

Plasmatic Systems, Inc. Plasma Preen II #973.

 

Description:

Device and wafer surface cleaning treatments procedures, removal of organic residuals and native oxides.

 

Specification:

  • Water cooled reactor with 9’’ x 7’’ x 3’’ Reaction Chamber.
  • Material: Pyrex & Aluminum.
  • Gas Supply: Argon and Oxygen.
  • 60Hz power.
  • Electrical Specifications: 120V, 60Hz.
  • Maximum Temperature: 200°C.
  • Temperature Range: 25° to 200°C.

 

Location:

Engineering Cleanroom, Wolfson building of Electrical Engineering.

 

Tool Owner:

Gidon Jacob (gjacob@tauex.tau.ac.il).

 

Tool Trainer:

Erez Benjamin (erezbenj@mail.tau.ac.il).

 

Rates & Costs for external Commercial / Industrial:

Clean Room – 200 NIS/hr.

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