Deep RIE Versaline DSE

Deep RIE Versaline DSE
Deep RIE Versaline DSE
  • Description
  • Specification
  • Location & Tool Owner

 

Manufacturer and model:

Deep RIE Versaline DSE.

 

Description:

Deep Silicon Etcher for High aspect ratio (HAR) micro-nano features as well as for fast isotropic silicon wafer thinning.

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