KLA P-17 Mechanical Stylus Profilometer

Manufacturer and Model:
KLA - P-17 Mechanical Stylus Profilometer

Description:
The KLA P-17 Mechanical Profilometer is a high-precision stylus-based surface metrology system designed for advanced thin film measurement, step height analysis, surface roughness characterization, and stress measurement.

The P-17 is part of KLA's industry-leading mechanical profilometer family, offering improved accuracy, automation capabilities, and repeatability compared to earlier models such as the P-6. It is ideal for semiconductor R&D, MEMS, microelectronics, materials science, and academic research laboratories.

Common applications:

The KLA P-17 is widely used for:

• Photoresist thickness measurement
• Thin film thickness measurement (metals, oxides, nitrides, polymers)
• Etch depth characterization
• MEMS structure profiling
• Microfabrication process control
• Surface roughness (Ra, Rq, Rt) analysis
• Step height measurement in semiconductor devices
• Wafer stress and bow measurement
• Research in nanotechnology and advanced materials