ATV Vacuum oven 301

ATV Vacuum oven 301
ATV Vacuum oven 301

Manufacturer and model:

ATV Vacuum Reflow Oven, SRO-700.

 

Description:

SRO-700 is a versatile tabletop IR vacuum reflow system for semiconductor and MEMS application.

 

Specification:

  • Temperature: 450 °C, up to 750 °C.
  • Heated plate ramping: > 3.5 °C/second (ramping up) ; >2 °C/second (ramping down).
  • Pressure: ~ 5x10-5 mbar.
  • Footprint: 770 x 560 x 800mm (L x W x H).
  • Weight: 65 kg.
  • Chamber height: 100mm.
  • Heated area: 230 x 217mm.
  • Chamber lid opening/closing: Manual.
  • IR Heating: Array of 8 IR lamps in Quartz glass tubes (2 Heating zones).
  • Power connection: 3Ph-N-PE 230/400v, 50/60Hz.
  • Power: 6.5 kW.

 

Common Applications:

  • IGBT/DBC.
  • Power Semiconductors.
  • MEMS Devices.
  • DIE Attachment.
  • High Power LED.
  • Hybrid Assembly.
  • Flip Chip.
  • Package Sealing.
     

Location:

Wolfson building of Electrical Engineering, Room #301.

 

Tool Owner:

Gidon Jacob (gjacob@tauex.tau.ac.il).

 

Tool Trainer:

Gidon Jacob (gjacob@tauex.tau.ac.il).

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