Confocal Microscope Olympus LEXT 5100

Confocal Microscope Olympus LEXT 5100
  • Description
  • Specification
  • Location & Tool Owner

 

Manufacturer and model:

Olympus OLS 5100 LEXT.

 

Description:

Confocal Microscope for measurements of surface roughness, film thickness, profile, and wafer stress analysis.

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