Heidelberg

Manufacturer and model:

HEIDELBERG INSTRUMENTS DWL 66fs.

Description:

• A high-resolution direct-write pattern generator, mask and wafer writing.
• Ideal for research and development (R&D) in microelectronics, MEMS, microfluidics, sensors, non-standard substrates and advanced packing.

Specification:

• High-Resolution Mode, front-and backside alignment, absolute position calibration and an automatic loading system.
• <1.0 µm line width resolution.
• Up to 7” photo-masks.
• 4” & 5” standard.
• Soda lime/Quartz.

​Location:

Engineering Cleanroom, Wolfson building Electrical Engineering.

Tool Owner:

Anastasia Adelberg (anastasiia@tauex.tau.ac.il).

Tool Trainer:

Anastasia Adelberg (anastasiia@tauex.tau.ac.il).