Heidelberg
Manufacturer and model:
HEIDELBERG INSTRUMENTS DWL 66fs.
Description:
- A high-resolution direct-write pattern generator, mask and wafer writing.
- Ideal for research and development (R&D) in microelectronics, MEMS, microfluidics, sensors, non-standard substrates and advanced packing.
Specification:
- High-Resolution Mode, front-and backside alignment, absolute position calibration and an automatic loading system.
- <1.0 µm line width resolution.
- Up to 7” photo-masks.
- 4” & 5” standard.
- Soda lime/Quartz.
Location:
Engineering Cleanroom, Wolfson building Electrical Engineering.
Tool Owner:
Anastasia Adelberg (anastasiia@tauex.tau.ac.il).
Tool Trainer:
Anastasia Adelberg (anastasiia@tauex.tau.ac.il).
* Industry |
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Size |
HR |
LR |
|||||
4" | 2,700 | 1,925 | |||||
5" | 3,900 | 2,550 |