Heidelberg

Heidelberg
Heidelberg

Manufacturer and model:

HEIDELBERG INSTRUMENTS DWL 66fs.

 

Description:

  • A high-resolution direct-write pattern generator, mask and wafer writing.
  • Ideal for research and development (R&D) in microelectronics, MEMS, microfluidics, sensors, non-standard substrates and advanced packing.

 

Specification:

  • High-Resolution Mode, front-and backside alignment, absolute position calibration and an automatic loading system.
  • <1.0 µm line width resolution.
  • Up to 7” photo-masks.
  • 4” & 5” standard.
  • Soda lime/Quartz.


Location:

Engineering Cleanroom, Wolfson building Electrical Engineering.

 

Tool Owner:

Anastasiia Adelberg (anastasiia@tauex.tau.ac.il).

 

Tool Trainer:

Anastasiia Adelberg (anastasiia@tauex.tau.ac.il).

 

Rates & Costs for external Commercial / Industrial (relevant for wafer writing):

Clean Room - 200 NIS / hr

Tool - 440 NIS / hr

Staff Time - 440 NIS / hr.

 

* Industry

Size

HR

LR

4" 2,450 1,750
5" 3,550 2,319
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