Prof. Yosi Shacham

Nano-chemical processes for microelectronics and integration of biological material on chip for acute toxicity detection



Silicon-based nano-technologies; nanoline interconnect technology and multilevel metallization system;
Copper technology (metals and dielectrics) for ULSI; inspection of sub-half-micron interconnect systems (electrical, optical, X-ray and others); Physics and technology of MOS devices


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