E-Beam Lithography Raith 150 Ⅰ

E-Beam Lithography Raith 150 Ⅰ
E-Beam Lithography Raith 150 Ⅰ
  • Description
  • Specification
  • Location & Tool Owner

 

Manufacturer and model:

RAITH150

 

Description:

The Raith150 represents a new and innovative generation of electron-beam writers for R&D application and close the gap between the SEM conversions and expensive production equipment. The Raith 150 is capable of a resolution of about 50 nm.

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