X-ray Photoelectron Spectrometer Microprobe (XPS) and multi-technique surface analysis instrument


Manufacturer and model:

ESCALAB QXi X-ray Photoelectron Spectrometer Microprobe.



Multi-technique surface analysis instrument with high-resolution X-ray photoelectron spectroscopy and imaging.



Monochromated X-ray source
  • Micro-focused dual-anode Al K-Alpha and Ag L-Alpha source.
  • 180°, double-focusing, bi-polar hemispherical analyzer with dual detector system for spectroscopy and imaging.
Ion source
  • Monatomic and gas cluster Ar ion source.
Vacuum system
  • Two turbo molecular pumps for entry and analysis chambers, with rotary pumps or oil-free backing pumps; auto-firing, 3-filament titanium sublimation pump for analysis chamber.
Sample stage
  • 5-axis sample stage with sample heating and cooling capabilities.
  • Fully automated sample exchange from load-lock parking post to analysis chamber.
Included analysis techniques
  • X-ray photoelectron spectroscopy (XPS) with imaging capability.
  • Reflected electron energy loss spectroscopy (REELS).
  • Ion scattering spectroscopy (ISS).
  • UV lamp for UV photoelectron spectroscopy (UPS) .
  • Field emission electron source for Auger electron spectroscopy (AES), AES microscopy, and SEM .
Optional accessories
  • Sensitive samples transfer vessel.
  • Heat/cool stage.
  • In-situ 4 contacts.

XPS/AES Examples of Activity.



Multidisciplinary Research Building, Room #003.


Tool Owner:

Dr. Pini Shekhter (shpini@tauex.tau.ac.il).

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