Manufacturer and model:
ESCALAB QXi X-ray Photoelectron Spectrometer Microprobe.
Description:
Multi-technique surface analysis instrument with high-resolution X-ray photoelectron spectroscopy and imaging.
Specification:
| Monochromated X-ray source |
- Micro-focused dual-anode Al K-Alpha and Ag L-Alpha source.
|
| Analyze |
- 180°, double-focusing, bi-polar hemispherical analyzer with dual detector system for spectroscopy and imaging.
|
| Ion source |
- Monatomic and gas cluster Ar ion source.
|
| Vacuum system |
- Two turbo molecular pumps for entry and analysis chambers, with rotary pumps or oil-free backing pumps; auto-firing, 3-filament titanium sublimation pump for analysis chamber.
|
| Sample stage |
- 5-axis sample stage with sample heating and cooling capabilities.
- Fully automated sample exchange from load-lock parking post to analysis chamber.
|
| Included analysis techniques |
- X-ray photoelectron spectroscopy (XPS) with imaging capability.
- Reflected electron energy loss spectroscopy (REELS).
- Ion scattering spectroscopy (ISS).
- UV lamp for UV photoelectron spectroscopy (UPS) .
- Field emission electron source for Auger electron spectroscopy (AES), AES microscopy, and SEM .
|
| Optional accessories |
- Sensitive samples transfer vessel.
- Heat/cool stage.
- In-situ 4 contacts.
|
XPS/AES Examples of Activity.
Location:
Multidisciplinary Research Building, Room #003.
Tool Owner:
Dr. Pini Shekhter (shpini@tauex.tau.ac.il).
