Diener Plasma (EBL CR)

Manufacturer and model:

Plasma-System-Pico Surface Technology. Electronic Diener.

Description:

Device and wafer surface cleaning treatments procedures, removal of organic residuals and native oxides.

Specification:

• Semi automatic control.
• Generate frequency: 40kHz (standard); 13.56MHz; 2.45GHz.
• Generator power: 0W-200W for 40kHz, infinitely variable.
• Process timer.
• Pirani gauge.
• Gas Supply: Argon and Oxygen.

​Location:

Clean Room&E-beam Preparation Room, Nano center building.

Tool Owner:

Gidon Jacob (gjacob@tauex.tau.ac.il).

Tool Trainer:

Erez Benjamin (erezbenj@mail.tau.ac.il).