Diener Plasma (EBL CR)
Manufacturer and model:
Plasma-System-Pico Surface Technology. Electronic Diener.
Description:
Device and wafer surface cleaning treatments procedures, removal of organic residuals and native oxides.
Specification:
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Semi automatic control.
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Generate frequency: 40kHz (standard); 13.56MHz; 2.45GHz.
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Generator power: 0W-200W for 40kHz, infinitely variable.
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Process timer.
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Pirani gauge.
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Gas Supply: Argon and Oxygen.
Location:
Clean Room&E-beam Preparation Room, Nano center building.
Tool Owner:
Gidon Jacob (gjacob@tauex.tau.ac.il).
Tool Trainer:
Erez Benjamin (erezbenj@mail.tau.ac.il).