X-ray Photoelectron Spectrometer Microprobe (XPS) and multi-technique surface analysis instrument

XPS

Monochromated X-ray source	Micro-focused dual-anode Al K-Alpha and Ag L-Alpha source.
Analyze	180°, double-focusing, bi-polar hemispherical analyzer with dual detector system for spectroscopy and imaging.
Ion source	Monatomic and gas cluster Ar ion source.
Vacuum system	Two turbo molecular pumps for entry and analysis chambers, with rotary pumps or oil-free backing pumps; auto-firing, 3-filament titanium sublimation pump for analysis chamber.
Sample stage	5-axis sample stage with sample heating and cooling capabilities. Fully automated sample exchange from load-lock parking post to analysis chamber.
Included analysis techniques	X-ray photoelectron spectroscopy (XPS) with imaging capability. Reflected electron energy loss spectroscopy (REELS). Ion scattering spectroscopy (ISS). UV lamp for UV photoelectron spectroscopy (UPS) . Field emission electron source for Auger electron spectroscopy (AES), AES microscopy, and SEM .
Optional accessories	Sensitive samples transfer vessel. Heat/cool stage. In-situ 4 contacts.