E-beam Evaporator VST (Nano)

E-beam Evaporator VST (Nano)
E-beam Evaporator VST (Nano)

Manufacturer and model:




Capable of heating materials to high temperature, high purity film, very high deposition rates and evaporation of high temperature materials and refractory metals. Can evaporate high melting point materials.



Au, Ag, Al, Co, Cr, Cu, In, Nb, Ni, Mo, Pd, Pt, Sn, Ta, Ti, W. 



  • Up to 4‘’ wafers.
  • Load lock.
  • Rotating sample holder.
  • Base pressure 5x10-7 Torr.
  • 6 crucibles + 1 thermal source.
  • Typical deposition rate: 0.5 Å/sec.


Clean Room, Nano center building.


Tool Owner:

Nirit Porecki-Shamay (nporecki@tauex.tau.ac.il).


Tool Trainer:

Lev Rovinsky (levrovinsky@mail.tau.ac.il).


Rates & Costs for external Commercial / Industrial:

Clean Room - 200 NIS / hr.

Tool - 440 NIS / hr.

Staff Time - 440 NIS / hr.

Tel Aviv University makes every effort to respect copyright. If you own copyright to the content contained
here and / or the use of such content is in your opinion infringing, Contact us as soon as possible >>