E-beam Evaporator VST (Nano)

Manufacturer and model:

VST TFDS-680.

Description:

Capable of heating materials to high temperature, high purity film, very high deposition rates and evaporation of high temperature materials and refractory metals. Can evaporate high melting point materials.

Materials: 

Au, Ag, Al, Co, Cr, Cu, In, Nb, Ni, Mo, Pd, Pt, Sn, Ta, Ti, W. 

Specification:

• Up to 4‘’ wafers.
• Load lock.
• Rotating sample holder.
• Base pressure 5x10-7 Torr.
• Typical deposition rate: 0.5 Å/sec.
• Full wafer depostion

​Location:

Clean Room, Nano center building.

Tool Owner:

Sergio Bloch (csebta@tauex.tau.ac.il).

Tool Trainer:

Edi Mados (ednamados@mail.tau.ac.il).