Time-of-Flight Secondary Ion Mass Spectrometry (TOF-SIMS)
Manufacturer and model:
Physical Electronics USA, Model TRIFT97.
Description:
TOF-SIMS provides surface microanalysis of organic and inorganic materials by detection of secondary ions of atoms and molecules. Three modes of operation are possible: surface mass spectrometry; chemical imaging; depth profiling.
Specification:
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Ion sources: Ga+, Cs+, O2+.
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Detection limit: ppm-ppb.
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Spatial resolution at imaging: >100 nm.
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Probing depth: 1-3 monolayers in static mode.
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Depth resolution: 0.5 nm with 500eV sputter gun.
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Mass range: 0 - 10.000 amu.
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Detectable elements: H – U, molecular species.
Location:
Multidisciplinary Research Building, Room #004.
Tool Owner:
Dr. Alexander Gladkikh (alexgl@post.tau.ac.il).