Time-of-Flight Secondary Ion Mass Spectrometry (TOF-SIMS)

Manufacturer and model:

Physical Electronics USA, Model TRIFT97.

Description:

TOF-SIMS provides surface microanalysis of organic and inorganic materials by detection of secondary ions of atoms and molecules. Three modes of operation are possible:   surface mass spectrometry; chemical imaging; depth profiling. 

Specification:

• Ion sources: Ga+, Cs+, O2+.
• Detection limit: ppm-ppb.
• Spatial resolution at imaging: >100 nm.
• Probing depth: 1-3 monolayers in static mode.
• Depth resolution: 0.5 nm with 500eV sputter gun.
• Mass range: 0 - 10.000 amu.
• Detectable elements: H – U, molecular species. 

Location:

Multidisciplinary Research Building, Room #004.

Tool Owner:

Dr. Alexander Gladkikh (alexgl@post.tau.ac.il).