Time-of-Flight Secondary Ion Mass Spectrometry (TOF-SIMS)

Time-of-Flight Secondary Ion Mass Spectrometry
Time-of-Flight Secondary Ion Mass Spectrometry

Manufacturer and model:

Physical Electronics USA, Model TRIFT97.

 

Description:

TOF-SIMS provides surface microanalysis of organic and inorganic materials by detection of secondary ions of atoms and molecules. Three modes of operation are possible:   surface mass spectrometry; chemical imaging; depth profiling. 

 

Specification:

  • Ion sources: Ga+, Cs+, O2+.
  • Detection limit: ppm-ppb.
  • Spatial resolution at imaging: >100 nm.
  • Probing depth: 1-3 monolayers in static mode.
  • Depth resolution: 0.5 nm with 500eV sputter gun.
  • Mass range: 0 - 10.000 amu.
  • Detectable elements: H – U, molecular species. 

 

Location:

Multidisciplinary Research Building, Room #004.

 

Tool Owner:

Dr. Alexander Gladkikh (alexgl@post.tau.ac.il).

 

Rates & Costs for external Commercial / Industrial:

880 NIS / hr.

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