Time-of-Flight Secondary Ion Mass Spectrometry (TOF-SIMS)

Time-of-Flight Secondary Ion Mass Spectrometry
Time-of-Flight Secondary Ion Mass Spectrometry

 

  • Ion sources: Ga+, Cs+, O2+.
  • Detection limit: ppm-ppb.
  • Spatial resolution at imaging: >100 nm.
  • Probing depth: 1-3 monolayers in static mode.
  • Depth resolution: 0.5 nm with 500eV sputter gun.
  • Mass range: 0 - 10.000 amu.
  • Detectable elements: H - U, molecular species. 

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