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    Lithography

     

    Mask Aligner MA6/BA GEN4

    Photolithography (micron features).

     

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    Erez Benjamin | 03-6409837 | erezbenj@tauex.tau.ac.il

     

     

    E-Beam Lithography Raith 150 Ⅰ

    Raith 150 Ultra High Precision E-Beam Lithography and Metrology System (nanometer features).

     

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    Inna Shechtman | 03-6404262 | innas@tauex.tau.ac.il

     

     

    E-Beam Lithography Raith 150 Ⅱ

    E-beam lithography (nanometer features).

     

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    Inna Shechtman | 03-6404262 | innas@tauex.tau.ac.il

     

     

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