Lithography

Lithography

 

Helius 5 Dual Beam FIB ThermoFisher 

The Helios 5 is an integrated focused ion beam (FIB) and scanning electron beam, dual functionality in one machine. 

 

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Roy Davidi | 03-6409949 | roydavidi@tauex.tau.ac.il

 

 

Mask Aligner MA6

Photolithography (micron features).

 

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Dr. Boris Yofis | 03-6405710 | boris.yofis@gmail.com

 

 

Mask Aligner MJB3

Photolithography (micron features).

 

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Dr. Boris Yofis | 03-6405710 | boris.yofis@gmail.com

 

 

E-Beam Lithography Raith 150 Ⅰ

Raith 150 Ultra High Precision E-Beam Lithography and Metrology System (nanometer features).

 

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Inna Shechtman | 03-6405710 | innas@tauex.tau.ac.il

 

 

E-Beam Lithography Raith 150 Ⅱ

E-beam lithography (nanometer features).

 

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Inna Shechtman | 03-6405710 | innas@tauex.tau.ac.il

 

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