Lithography

Lithography at TAU.nano enables high-precision patterning with resolutions ranging from 10 nanometers to several microns, facilitating advanced research and development in nanotechnolog

 
 

Mask Aligner MA6/BA GEN4

Photolithography (micron features).
 

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E-Beam Lithography Raith 150 Ⅰ

Raith 150 Ultra High Precision E-Beam Lithography and Metrology System (nanometer features).

 

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E-Beam Lithography Raith 150 Ⅱ

E-beam lithography (nanometer features).

 

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