Etch

Etch

RIE NEXTRAL

Reactive Ion Etch system with a High Density Plasma reactor (HDP).

 

Read more>>

Dr. Valery Garber | 03-6405713 | Valeryg@tauex.tau.ac.il

 

 

RIE Oerlicon

A Reactive Ion Etch system with a parallel plate plasma etching, which contributes to an anisotropic thin film etching.  

 

Read more>>

Dr. Boris Yofis | 03-6407718 | boris.yofis@gmail.com

 

 

Deep RIE SLR ICP

Unaxis Shuttlelock Deep Reactive Ion Etcher.

 

Read more>>

Dr. Valery Garber | 03-6405713 | Valeryg@tauex.tau.ac.il

 

 

Deep RIE Versaline DSE

Deep Reactive Ion Etcher provides profile control and side wall smoothness.

 

Read more>>

Erez Benjamin | 03-6409837 | erezbenj@mail.tau.ac.il

 

 

 

Ion Beam Milling AJA

Physical etching technique in a vacuum chamber.

 

Read more>>

Nirit Porecki-Shamay | 03-6404262 | nporecki@tauex.tau.ac.il

 

 

Plasma Preen

A microprocessor controlled microwave oven, which produces plasma within a vacuum chamber.

 

Read more>>

Gidon Jacob| 03-6405303 | gjacob@tauex.tau.ac.il

 

 

Diener Plasma (EBL CR)

 

Read more>>

Gidon Jacob| 03-6405303 | gjacob@tauex.tau.ac.il

 

 

Back to fabrication lobby >>

Tel Aviv University makes every effort to respect copyright. If you own copyright to the content contained
here and / or the use of such content is in your opinion infringing, Contact us as soon as possible >>