APREO HRSEM with Cathodoluminescence
- Resolution (optimal working distance):
- High vacuum, field-free mode
- 0.7 nm at 30 kV (STEM)
- 0.9 nm at 15 kV (with beam deceleration)
- 1.2 nm at 1 kV
- 1.0 nm at 1 kV (with beam deceleration)
- 1.2 nm at 500 V (with beam deceleration)
- High vacuum, immersion mode
- 0.9 nm at 1 kV
- High vacuum, immersion mode with beam deceleration
- 0.5 nm at 15 kV
- 0.8 nm at 1 kV
- 1.0 nm at 1 kV, 10 mm WD
- 0.8 nm at 500 V
- 1.2 nm at 200 V
- Low vacuum, field-free mode
- 1.2 nm at 15 kV
- 1.8 nm at 3 kV
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